Jürgen Brugger
EPFL STI IMT LMIS1
BM 3107 (Bâtiment BM)
Station 17
1015 Lausanne
+41 21 693 65 73
Office: BM 3107
EPFL › STI › IEM › LMIS1
Website: https://lmis1.epfl.ch/
Expertise
Micro/Nanomanufacturing
Cleanroom process training
Digital education using mixed reality
Education
PhD
| Physical-Electronics
1995 – 1995
Neuchatel
Directed by
Thesis advisor: Prof. N.F. de Rooij (IMT Universite de Neuchatel)
Diplome (M.Sc.)
| Electronique-Physique1990 – 1990 Neuchatel
Professionals experiences
Full Professor
Associate Professor
Assistant Professor
Research Program Coordinator "NanoLink"
Awards
Elected Full Member
Swiss Academy of Engineering Sciences (SATW)
2024
MNE Fellow
International Micro and Nanoengineering Society
2022
IEEE Fellow
IEEE
2016
ERC Advanced Grant
European Research Council
2016
Additive manufacturing of water-soluble 3D micro molds for complex-shaped lipid microparticles
Nature communications. 2025. DOI : 10.1038/s41467-025-56984-7.Additive manufacturing of flexible, biodegradable drug implants for sustained multi-drug release into the cochlea
Sensors and Actuators B: Chemical. 2025. DOI : 10.1016/j.snb.2025.138496.3D Lipid Microrobots for Simultaneous Delivery of Lipophilic and Hydrophilic Drugs
2025. 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Orlando, FL, USA, 2025-06-29 - 2025-07-03. p. 1961 - 1964. DOI : 10.1109/transducers61432.2025.11111541.Beyond the Mask: Advancing Fabrication and Immersive Learning
2025. 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Orlando, FL, USA, 2025-06-29 - 2025-07-03. p. 112 - 117. DOI : 10.1109/transducers61432.2025.11111244.Combination of Thermal Scanning Probe Lithography and Directed Self-Assembly of Block Copolymers
2025. SPIE Advanced Lithography + Patterning (2025), San Jose, United States, 2025-02-22 - 2025-02-27. DOI : 10.1117/12.3050036.Deterministic grayscale nanotopography to engineer mobilities in strained MoS<inf>2</inf> FETs
Nature communications. 2024. DOI : 10.1038/s41467-024-51165-4.Laser-Induced Forward Transfer of SU-8 Microdisks as Carriers of Metallic Microdevices
Journal of Microelectromechanical Systems. 2024. DOI : 10.1109/JMEMS.2024.3487248.Near-Room-Temperature Detection of Aromatic Compounds with Inkjet-Printed Plasticized Polymer Composites
Acs Sensors. 2024. DOI : 10.1021/acssensors.3c02406.Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification
Microsystems & Nanoengineering. 2024. DOI : 10.1038/s41378-024-00655-y.Tomographic microscopy of functionally graded polymer-derived SiCN ceramics with tunable gradients
Materialia. 2024. DOI : 10.1016/j.mtla.2024.102025.Multi- and Gray-Scale Thermal Lithography of Silk Fibroin as Water-Developable Resist for Micro and Nanofabrication
Advanced Science. 2024. DOI : 10.1002/advs.202303518.Ferroelectric gating of two-dimensional semiconductors for the integration of steep-slope logic and neuromorphic devices
Nature Electronics. 2023. DOI : 10.1038/s41928-023-01018-7.Fabrication and characterization of NbTi microwave superconducting resonators
Micro And Nano Engineering. 2023. DOI : 10.1016/j.mne.2023.100203.MEWron: An open-source melt electrowriting platform
Additive Manufacturing. 2023. DOI : 10.1016/j.addma.2023.103604.Nanopore Generation in Biodegradable Silk/Magnetic Nanoparticle Membranes by an External Magnetic Field for Implantable Drug Delivery
ACS Applied Materials & Interfaces. 2022. DOI : 10.1021/acsami.2c10603.Precision Surface Microtopography Regulates Cell Fate Via Changes To Actomyosin Contractility And Nuclear Architecture
Tissue Engineering Part A. 2022. DOI : 10.1089/ten.tea.2022.29025.abstracts.A Simple And Scalable Technology For Micro And Nano-Topographic Patterning Of Standard Cell Cultureware To Screen Cell Behaviour In Vitro
2022. p. S221 - S221.SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor
Microsystems & Nanoengineering. 2022. DOI : 10.1038/s41378-022-00351-9.Multiscale 2D/3D microshaping and property tuning of polymer-derived SiCN ceramics
Journal of the European Ceramic Society. 2021. DOI : 10.1016/j.jeurceramsoc.2021.12.044.Recent progress in silk fibroin-based flexible electronics
Microsystems & Nanoengineering. 2021. DOI : 10.1038/s41378-021-00261-2.PhD Students
Shulang Shen, Tao Zhang, Pol Torres Vila, Qinglan Shan, Chenhao Wang, Chenxiang Zhang
Past EPFL PhD Students
Mario Andres Chavarria Varon, Mohammadmahdi Kiaee, Zhiwei Yang, Mattia Marelli, Vahid Fakhfouri, Valentin Flauraud, Henry Shao-Chi Yu, Grégory Mermoud, Lorenz Hagelüken, Kristopher Pataky, Katrin Sidler Arnet, Enrica Montinaro, Thomas Walger, Jonas Gustav Henriksson, Johannes Steen, Yi-Chiang Sun, Shenqi Xie, Loïc Jacot-Descombes, Thomas Kiefer, Jonas Grossenbacher, Oscar Vazquez Mena, Sivashankar Krishnamoorthy, Roberto Russo, Samuel Tobias Howell, Ya Wang, Jongeon Park, Berke Erbas, Mona Julia Katharina Klein, Mirjana Banjevic, Matthieu Jean Michel Rüegg
Courses
MEMS sensors practicals
Advanced topics in micro- and nanomanufacturing: top-down meets bottom-up
This course introduces advanced fabrication methods enabling the manufacturing of novel micro- and nanosystems (NEMS/MEMS). Both top-down techniques (lithography, stenciling, scanning probes, additive techniques) and bottom-up approaches (self-assembly) are presented.
Microfabrication technologies
The student will learn process techniques and applications of modern micro- and nanofabrication, as practiced in a clean room, with a focus on silicon, but also multi-material microsystems and flexible/stretchable systems technologies.
Selected topics in advanced manufacturing
The course aims at providing a comprehensive overview of ongoing advanced manufacturing research topics and an opportunity for students to investigate current research trends in one particular topic of their choice.
Advanced additive manufacturing technologies
Advanced 3D forming techniques for high throughput and high resolution (nanometric) for large scale production. Digital manufacturing of functional layers, microsystems and smart systems.
Introduction to additive manufacturing
The state of the art in the domain of additive production processes (the part is built by material addition without use of a shape tool) will be presented. The main application/benefits/shortcomings of the common additive processes as well as technological and economical issues will be discussed.
MOOC: Micro and Nanofabrication (MEMS) - Spring
Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC will not only explain the basics of microfabrication but also show the practice through videos.
Microfabrication practicals
Advanced microfabrication practicals
This TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small group together with PhD students/postdocs during 14 weeks touching all aspects of a microprocess.
Nanotechnology
This course gives the basics for understanding nanotechnology from an engineer's perspective: physical background, materials aspects and scaling laws, fabrication and imaging of nanoscale devices.
Soft Microsystems Processing and Devices
Amongst others, following topics will be covered during the course: - Soft Microsystems and Electronics - Electroactive polymers - Printed electronics and microsystems - Inkjet printing of polymers - Stretchable electronics - Mechanical reliability - Stencil lithography - Scanning Probe Lithography
MEMS practicals I
MOOC: Micro and Nanofabrication (MEMS)
Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC will not only explain the basics of microfabrication but also show the practice through videos.