Nico de Rooij
Expertise
Microsystems Technology, MEMS, Sensors & Actuators, Lab-on-a-Chip, Nanotools, Optical MEMS with applications in medicine, ecology, space research or watchmaking.
Nico de Rooij is Professor Emeritus of EPFL and former Vice-President of CSEM SA.
He was Professor of Microengineering at EPFL and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 2009 until 2016.
His research activities include the design, micro fabrication and application of miniaturized silicon based sensors, actuators, and microsystems. He authored and coauthored over 300 published journal articles.
He was Professor at the University of Neuchatel and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 1982 to 2008. From October 1990 until October 1996 and again from October 2002 until June 2008, he served as Director of the Institute of Microtechnology at the University of Neuchatel (IMT UniNE).
He also lectured at the Swiss Federal Institute of Technology, Zurich (ETHZ) and since 1989, he was part-time full professor at the Swiss Federal Institute of Technology, Lausanne (EPFL). He was Director of EPFL's Institute of Microengineering (EPFL IMT) from 2009 to 2012, following the transfer of the IMT Uni-NE to EPFL's School of Engineering.
He was appointed Vice-President of the CSEM SA in February 2008 and headed the newly created Microsystems Technology Division of CSEM SA.
Furthermore, he has directed and co-directed over 80 doctoral theses during his academic career. The components and microsystems created in his laboratory have given rise to several start-ups in the Neuchâtel region (Seyonic SA, Sercalo SA, 1Drop Diagnostics)
Nico de Rooij is a Fellow of the IEEE (2001) and a Fellow of the Institute of Physics (UK) (2004). He is recipient of the IEEE Jun-ichi Nishizawa Gold Medal (2007), the Schlumberger Prize (1992), the MNE Fellow Award 2016 and the Prix Gaîa (2022).
He was awarded a Visiting Investigatorship Program (VIP) in MEMS/NEMS Systems by A*STAR Science and Engineering Council (SERC), Singapore and hosted by SIMTech for the period 2005-2008.
Nico de Rooij is Corresponding Member of the Royal Netherlands Academy of Arts and Sciences (KNAW) and Individual Member of the Swiss Academy of Engineering Sciences (SATW). He was serving on the Editorial Boards of the IEEE/ASME Journal of Micro Electro Mechanical Systems (IEEE JMEMS), the IEEE Proceedings, the Journal of Micromechanics and Microengineering (JM&M), Sensors and Actuators and Sensors and Materials. He was Member of the Information and Communication Technology Jury of the BBVA Foundation Frontiers of Knowledge Awards from 2009 to 2012.
He received his M.Sc. degree in physical chemistry from the State University of Utrecht, The Netherlands, in 1975, and a Ph.D. degree from Twente University of Technology, The Netherlands, in 1978. From 1978 to 1982, he worked at the Research and Development Department of Cordis Europa N.V., The Netherlands.
He was Professor of Microengineering at EPFL and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 2009 until 2016.
His research activities include the design, micro fabrication and application of miniaturized silicon based sensors, actuators, and microsystems. He authored and coauthored over 300 published journal articles.
He was Professor at the University of Neuchatel and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 1982 to 2008. From October 1990 until October 1996 and again from October 2002 until June 2008, he served as Director of the Institute of Microtechnology at the University of Neuchatel (IMT UniNE).
He also lectured at the Swiss Federal Institute of Technology, Zurich (ETHZ) and since 1989, he was part-time full professor at the Swiss Federal Institute of Technology, Lausanne (EPFL). He was Director of EPFL's Institute of Microengineering (EPFL IMT) from 2009 to 2012, following the transfer of the IMT Uni-NE to EPFL's School of Engineering.
He was appointed Vice-President of the CSEM SA in February 2008 and headed the newly created Microsystems Technology Division of CSEM SA.
Furthermore, he has directed and co-directed over 80 doctoral theses during his academic career. The components and microsystems created in his laboratory have given rise to several start-ups in the Neuchâtel region (Seyonic SA, Sercalo SA, 1Drop Diagnostics)
Nico de Rooij is a Fellow of the IEEE (2001) and a Fellow of the Institute of Physics (UK) (2004). He is recipient of the IEEE Jun-ichi Nishizawa Gold Medal (2007), the Schlumberger Prize (1992), the MNE Fellow Award 2016 and the Prix Gaîa (2022).
He was awarded a Visiting Investigatorship Program (VIP) in MEMS/NEMS Systems by A*STAR Science and Engineering Council (SERC), Singapore and hosted by SIMTech for the period 2005-2008.
Nico de Rooij is Corresponding Member of the Royal Netherlands Academy of Arts and Sciences (KNAW) and Individual Member of the Swiss Academy of Engineering Sciences (SATW). He was serving on the Editorial Boards of the IEEE/ASME Journal of Micro Electro Mechanical Systems (IEEE JMEMS), the IEEE Proceedings, the Journal of Micromechanics and Microengineering (JM&M), Sensors and Actuators and Sensors and Materials. He was Member of the Information and Communication Technology Jury of the BBVA Foundation Frontiers of Knowledge Awards from 2009 to 2012.
He received his M.Sc. degree in physical chemistry from the State University of Utrecht, The Netherlands, in 1975, and a Ph.D. degree from Twente University of Technology, The Netherlands, in 1978. From 1978 to 1982, he worked at the Research and Development Department of Cordis Europa N.V., The Netherlands.
Past PhD Students
Selected publications
Analysis of Lipoproteins by Capillary Zone Electrophoresis in Microfluidic Devices: Assey Development and Surfaces Roughness Measurements
B. Weiller, L. Ceriotti, T. Shibata, D. Rein, M.A. Roberts, J. Lichtenberg, J.B. German, N.F. de Rooij, E. Verpoorte
Published in Analytical Chemistry, Vol. 74, pp. 1702-1711, 2002, 2002 in
Detecting single molecules launched for liquid surfaces in a time-of-flight mass spectrometer using ultraviolet and infrared lasers.
D. Twerenbold, A. Netuschill, N.F. de Rooij, P. Luginbuhl, D. Gerber, D. Gritti, Y. Gonin, F. Rossel, J.L. Vuilleumier
Published in Proteomic's, Vol. 2, pp. 436-440, 2002, 2002 in
Detecting single molecules launched for liquid surfaces in a time-of-flight mass spectrometer using ultraviolet and infrared lasers
D. Twerenbold, N.F. de Rooij, P. Luginbuhl, D. Gerber, D. Gritti, Y. Gonin, F. Rossel, J.L. Vuilleumier
Published in Analytical Chemistry, Vol. 74, pp. 436-440, 2002, 2002 in
Infoscience
Biosensor Probe Arrays for Real-Time Monitoring of Neurotransmitters
World Congress on Medical Physics and Biomedical Engineering, Munich, Germany, September 7-12, 2009.Welcome Message, General Chairman
IEEE-NEMS 2009, Shenzen, January 5-8, 2009.Fast Quality Control with Diffractive Micro-and Nanostructures
CTI Micro and Nano Technologies Event 2009, Neuchâtel, November 11, 2009.Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 1. Optical absorptivity
Sensors and Actuators A: Physical. 2009. DOI : 10.1016/j.sna.2008.12.023.Microsystèmes, nanotechnologie et biologie: panorama, enjeux, difficultés
SMB2009 Sciences de la miniaturisation et biologie, Grenoble, June 8-12, 2009.Colorimetric gas sensors based on optical waveguides made on plastic foil
2009. Eurosensors XXIII, Lausanne, September 6-9, 2009. p. 576 - 579. DOI : 10.1016/j.proche.2009.07.144.Microfluidic System for Near- and Mid-Infrared Analysis of Human Saliva
Nano-Tera Workshop: Biosensors and Body Area Networks, Le Louverain, Switzerland, November 23-24, 2009.Scalable cascaded snap-in actuators for large-stroke displacements
2009. Transducers 2009, Denver, June 21-25,2009. p. 1754 - 1757. DOI : 10.1109/SENSOR.2009.5285742.CPT spectroscopy on low-temperature sealed MEMS rubidium vapour cells
23rd European Frequency and Time Forum and 63rd consecutive meeting of the IEEE International Frequency Control Symposium, Besançon, France, April 20-24, 2009.Micro-fabrication of polymeric devices using hot roller embossing
2009. 34th International Conference on Micro-and Nano-Engineering, Athens, September 15-18, 2008. p. 933 - 936. DOI : 10.1016/j.mee.2008.12.021.Temperature, humidity and gas sensors integrated on plastic foil for low power applications
Sensors and Actuators B: Chemical. 2009. DOI : 10.1016/j.snb.2009.04.019.Influence of the Adsorbent Material in the Performances of a Micro Gas Preconcentrator
2009. 13th International Symposium on Olfaction and Electronic Nose, Brescia, April 15-17, 2009. p. 323 - 326.Linearly deformable micro membrane for dynamic laser beam shaping and homogenizing
EOS Conference on Manufacturing of Optical Components, Munich, Germany, June 15-17, 2009.Exploring Asian markets through research exchange
SwissnexDay 09, Winterthur, December 12, 2009.Hybrid microfluidic cartridge formed by irreversible bonding of SU-8 and PDMS for multi-layer flow applications
2009. Eurosensors 2009, Lausanne, September 6-9, 2009. p. 381 - 384. DOI : 10.1016/j.proche.2009.07.095.Microcolumn design for a large scan field and pixel number
Journal of Vacuum Science & Technology B. 2009. DOI : 10.1116/1.3256265.MEMS for Watches
EPMT Environnement Professionnel MicroTechnologies, Lausanne, May 12-15, 2009.MEMS for space
2009. Transducers 2009, Denver, June 21-25, 2009. p. 17 - 24. DOI : 10.1109/SENSOR.2009.5285575.Epitaxial Thin Films on Silicon for MEMS devices
1st National Congress on Functional Oxide for Electronics - FOxE, Sorrento, March 25-27, 2009.Microsystems and Opportunities of Technology Transfer
Seminar ETH Zürich, Zürich, October 6, 2009.Fabrication and Characterisation of 1-D diffusing elements
15th Microptics Conference (MOC 09), Tokyo, October 25-28, 2009.Current developments in Microfabricated nanomaterials and device engineering
Les 2ème journéesTunisiennes des Nanosciences et Nanotechnologies, Tunis, July 11-13, 2009.Scanning gate microscopy measurements on a superconducting single-electron transistor
Physical Review B. 2009. DOI : 10.1103/PhysRevB.79.134530.A micro gas preconcentrator with improved performances for environmental monitoring
2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 983 - 986. DOI : 10.1109/SENSOR.2009.5285982.Microsystems Technology and Opportunities for Technology Transfer
Nano Device Seminar, University of Pennsylvania, Philadelphia, April 1, 2009.Biosensor Microprobe Functionalisation Using an On-Chip Dispensing Approach
2009. 23rd Eurosensors Conference, Lausanne, SWITZERLAND, Sep 06-09, 2009. p. 281 - 284. DOI : 10.1016/j.proche.2009.07.070.Simultaneous Chemical Recording and Stimulation in the Brain Using an Assembly of Biosensor Silicon Microprobes and SU-8 Microinjectors
2009. 23rd Eurosensors Conference, Lausanne, SWITZERLAND, Sep 06-09, 2009. p. 525 - 528. DOI : 10.1016/j.proche.2009.07.131.Large micromirror array for multi-object spectroscopy in cryogenic environment
2009. Conference on MOEMS and Miniaturized Systems VIII, San Jose, CA, Jan 27-28, 2009. DOI : 10.1117/12.811117.Evaluation of pH indicator-based colorimetric films for ammonia detection using optical waveguides
Sensors and Actuators B: Chemical. 2009. DOI : 10.1016/j.snb.2009.08.049.PYROMEMS IGNITER BASED ON A TEMPERATURE GRADIENT: CONCEPT, FABRICATION AND CHARACTERIZATION
2009. The 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington, December 1-4, 2009. p. 108 - 111.6Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping
2009. Laser Beam Shaping X, San Diego, August 02-06, 2009. p. 74300H - 74300H. DOI : 10.1117/12.827663.AFM measurements of Martian soil particles
2009. Workshop on the Microstructure of the Martian Surface, Copenhagen, August 27-29. 2009.Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude
2009. MOEMS-MEMS SPIE Photonics West, San José, January 27-28, 2009. DOI : 10.1117/12.808162.Gas Detection with a Micro FTIR Spectrometer in the MIR Region
2009. Eurosensors XXIII Conference, Lausanne, Switzerland, September 6 - 9, 2009. p. 1379 - 1382. DOI : 10.1016/j.proche.2009.07.344.Multi sensor platform on plastic foil for environmental monitoring
2009. Eurosensors XXIII, Lausanne, September 06-09, 2009. p. 597 - 600. DOI : 10.1016/j.proche.2009.07.149.Microfluidic connectors by ultrasonic welding
2009. The 34th International Conference on Micro- and Nano-Engineering (MNE), Athens, Greece, September 15-18, 2008. p. 1354 - 1357. DOI : 10.1016/j.mee.2009.01.048.Restrictive dual capacitively coupled contactless conductivity detection for microchip electrophoresis
2009. p. 1351 - 1354. DOI : 10.1016/j.proche.2009.07.337.Memory effects of ion-selective electrodes: Theory and computer simulation of the time-dependent potential response to multiple sample changes
Journal of Electroanalytical Chemistry. 2009. DOI : 10.1016/j.jelechem.2009.05.004.Thermal Characterization of Polycrystalline CVD Diamond Thin Films
2009. Eurosensors 2009, Lausanne, September 6-9, 2009. DOI : 10.1016/j.proche.2009.07.152.Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 2. Thermal property and sensitivity
Sensors and Actuators A: Physical. 2009. DOI : 10.1016/j.sna.2008.12.024.Tunable MEMS-based Optical Linear(1D)Diffusers for Dynamic Laser Beam Shaping and Homogenizing
2009. IEEE/LEOS International Conference of Optical MEMS & Nanophotonics, Clearwater Beach, August 17-20, 2009. p. 129 - 130. DOI : 10.1109/OMEMS.2009.5338551.Ultra-low power metal oxide gas sensor on plastic foil
2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 584 - 587. DOI : 10.1109/SENSOR.2009.5285392.Mars vue de Neuchâtel
Conférence Université de Neuchâtel, Neuchâtel, December 3, 2009.Complex nanostructures in PMMA made by a single process step using e-beam lithography
2009. 35th International Conference on Micro & Nano Engineering, Ghent, Belgium, September 28-October 01, 2009. p. 1139 - 1142. DOI : 10.1016/j.mee.2009.10.046.Silicon Microprobe Arrays for the Amperometric Detection of Choline in Brain Tissue
2008.Conductive supports for combined AFM–SECM on biological membranes
Nanotechnology. 2008. DOI : 10.1088/0957-4484/19/38/384004.Packaged MEMS Micromirrors for Cyrogenic Environment
2008. p. 758 - 761. DOI : 10.1109/MEMSYS.2008.4443767.Integrated Temperature, Humidity and Gas Sensors on Plastic Substrates for RFID and Low-Power Applications
2008.Label-Free Dectection of Single Protein Molecules and Protein-Protein Interactions using Synthetic Nanopores
Analytical Chemistry. 2008. DOI : 10.1021/ac7025207.Country Review
2008.Hybrid organic / inorganic sensing platforms on flexible plastic substrates
2008.Evaporation based micro pump integrated into a scanning force microscope probe
2008. Proceedings of the Conference on Micro- and Nano-Engineering, MNE 2007, Copenhagen, Denmark, September 23-26, 2007. p. 1302 - 1305. DOI : 10.1016/j.mee.2007.12.047.Micromirror array for multiobject spectroscopy in ground-based and space telescopes
2008. International Conference on Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation, Marseille, FRANCE, Jun 23-28, 2008. DOI : 10.1117/12.790358.Capacitive gas sensor arrays on plastic substrates for low power and mobiles applications
2008. p. 1431 - 1434.Thermally activated solvent bonding of polymers
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems. 2008. DOI : 10.1007/s00542-007-0459-1.Localized Growth and Integration of Carbon Nanotubes on Micro-Hotplates
Journal of the Korean Physical Society. 2008. DOI : 10.3938/jkps.52.1378.Applications of Bio-MEMS in Life Sciences
2008.MEMS for Space
2008.Microfluidic Cartridge for the (Bio)Chemical Functionalization of Pt Microelectrodes Integrated on Silicon Microprobes
2008.Detection of Surface Stress Induced Deflections in Piezoelectric Cantilever Sensors Using a Charge Integrator
2008. ICCAS 2008, Seoul, October 14-17, 2008. p. 937 - 940. DOI : 10.1109/ICCAS.2008.4694629.Dynamic and static thermal study of micromachined heaters: the advantages of visible and near-infrared thermography compared to classical methods
Journal of Micromechanics and Microengineering. 2008. DOI : 10.1088/0960-1317/18/6/065005.Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection
2008. Conference on PhD Research in Microelectronics and Electronics, Istanbul, TURKEY, June 22-25, 2008. p. 121 - 124. DOI : 10.1109/RME.2008.4595740.Transfer of UV Glue patterned by Photolithography for Microsystems assembling and packaging
2008. p. 1317 - 1320.Disposable, Continuous-Flow Biosensor for Multi-Analyte Monitoring and Microfluidic Control of the Linear Range
International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS) XII, San Diego, October 12-16, 2008.Micro-mirror array for multi-object spectroscopy in cryogenic environment
2008. 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, Germany, August 11-14, 2008. p. 114 - 115. DOI : 10.1109/OMEMS.2008.4607855.Digital Micro-thrusters with simplified architecture and reliable ignition and combustion
2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 157 - 160.Microsystems Technology and Opportunities for technology Transfer
2008.Evaluation of spin-coatable colorimetric films for ammonia detection using optical waveguides
2008.Establishment of a technology platform for epitaxial piezoelectric MEMS
2008. Eurosensors XXII, Dresden, Germany, September 7-10, 2008. p. 819 - 822.Computer simulation and theory of the diffusion-and flow-induced concentration dispersion in microfluidic devices and HPLC systems based on rectangular microchannels
Analytica Chimica Acta. 2008. DOI : 10.1016/j.aca.2008.05.063.Ion-selective microelectrode arrays for cell culture mo
Université de Neuchâtel, 2008.Microhotplates with TiN heaters
Sensors and Actuators A: Physical. 2008. DOI : 10.1016/j.sna.2008.08.016.Dynamic behavior of the tuning fork AFM probe
2008. MNE 2007 Micro- and Nano-Engineering Conference, Copenhagen, Denmark, September 23-26, 2007. p. 1018 - 1021. DOI : 10.1016/j.mee.2008.01.100.Intégration de l'IMT à l'EPFL - Perspectives d'avenir
2008.Study and fabrication of a micro scanner for optical applications
Université de Neuchâtel, 2008.Autonomous Sensors on flexible foils powered by RFID and energy scavenging for environmental and goods monitoring
2008. PowerMEMS 2008 + microEMS 2008, Sendai, November 9-12, 2008. p. 173 - 176.Introduction to micro-technology
2008.Micromirrors for multiobject spectroscopy: optical and cryogenic characterization
2008. Conference on MOEMS and Miniaturized Systems VII, San Jose, California, USA, January 22-23, 2008. DOI : 10.1117/12.764381.Multifunctional Micro-Optical Elements for Laser Beam Homogenizing and Beam Shaping
2008. Lasers and Applications in Science and Engineering, San Jose, California, United States. DOI : 10.1117/12.762923.Successful technology transfer of selected MEMS activities to the Watch Manufacturing Industry
2008.Large linear micromirror array for UV femtosecond laser pulse shaping
2008. IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, August 11-18, 2008. p. 39 - 40. DOI : 10.1109/OMEMS.2008.4607817.Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress
International Display Workshop IWD'08, Niigata, Japan, December 3-5, 2008.Les méthodes d’investigations à l’échelle nanoscopique
Carrefour Alliance workshop, Nanotechnologies, supersmall is beautiful!, Lausanne, May 21, 2008.MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008.MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008.Thermal simulation and characterization for the design of ultra-low power micro-hotplates on flexible substrate
2008. p. 74 - 77. DOI : 10.1109/ICSENS.2008.4716386.On the thermal simulation and characterisation of microsystems: progress and status
2008. p. 133 - 136.A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications
2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 269 - 272.Large Deformation Balloon Micro-Actuator Based on Pyrotechnics on Chip
2008. 21st IEEE International Conference on Micro Electro Mechanical Systems, Tucson, AZ, 13-17 Jan. 2008. p. 535 - 538. DOI : 10.1109/MEMSYS.2008.4443711.Oerlikon Solar
2008.Potentiometric platform for the quantification of cellular potassium efflux
Lab on a Chip. 2008. DOI : 10.1039/b801042k.Möglichkeiten und Anwendungen der Mikrosystemtechnologie
2008.Möglichkeiten der Mikro-und Nanosystemtechnologie
2007.Development and Characterization of Choline and L-Glutamate Biosensor Integrated on Silicon Microprobes for In-Vivo Monitoring
2007. p. 6039 - 6042. DOI : 10.1109/IEMBS.2007.4353725.Aspects of the synthesis and characterization of diamond and diamond like carbon films
Université de Neuchâtel, 2007.Microfluidic Stand-Alone Device for the Calibration of Brain-Implantable Biosensor Microprobes
2007. 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Paris, France, Oct 7-11,2007. p. 1288 - 1290.Application of carbon nano-powders for a gas micro-preconcentrator
Sensors and Actuators B: Chemical. 2007. DOI : 10.1016/j.snb.2007.07.029.Micro- and nanosystems for biology and medicine
Microelectronic Engineering. 2007. DOI : 10.1016/j.mee.2007.01.244.Beam steering system using a 2D MEMS scanner
2007. 20th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society, Lake Buena Vista, Floride, USA, October 21-25, 2007. p. 916 - 917. DOI : 10.1109/LEOS.2007.4382708.Microfluidic Channels in Porous Silicon Filled with a Carbon Absorbent for GAS Preconcentration
2007. TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Lyon, France, 10-14 06 2007. p. 249 - 252. DOI : 10.1109/SENSOR.2007.4300116.Recent Developments in Silicon-based MEMS Photonic Systems
2007.Highly integrated wafer level packaged Mox gas sensors
2007. p. 2401 - 2404. DOI : 10.1109/SENSOR.2007.4300654.Piezoresistive scanning probe arrays for operation in liquids
Journal of Physics: Conference Series. 2007. DOI : 10.1088/1742-6596/61/1/002.The Scanning Force Arthroscope: Development and First Measurements
2007.Micro-Hotplate Devices for Micro-SOFC
2007. p. 421 - 427.Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System
Japanese Journal of Applied Physics. 2007. DOI : 10.1143/JJAP.46.6458.Micro Gas Sensing Components on Flexible Substrates
2007.Applications of Bio-MEMS in Life-Sciences
2007.Piezoresistive cantilever array for life sciences applications
Journal of Physics: Conference Series. 2007. DOI : 10.1088/1742-6596/61/1/189.Member of the co-chairs committee
2007.Perspectives d'avenir, collaboration IMT-EPFL, projet Nano-Tera
2007.Brain Implantable Biosensors Integrated on Silicon Microprobe Arrays
2007.Scanning Force Arthroscope
2007.Magnetohydrodynamic pumping in nuclear magnetic resonance environments
Sensors and Actuators B: Chemical. 2007. DOI : 10.1016/j.snb.2006.09.026.Perspectives de l'Institut de mictrotechnique de l'Université de Neuchâtel
2007.Tunable Optical Microsystems featuring Vertical Electrostatic Comb Drives
Université de Neuchâtel, 2007.Recent Developments in Silicon-based MEMS Photonic Systems
2007.Integrated Temperature, Humidity and Gas Sensors on Flexible Substrates for Low-Power Applications
2007. p. 158 - 161. DOI : 10.1109/ICSENS.2007.4388360.Development of a platform for the monitoring of extracellular ionic activities
2007.A Calibration Tool for Passive Contact Temperature Probe
2007.Microsystems for the Space and Transport Industries
2007.Micromirror arrays for object selection
2007.Micromachined Platforms on Silicon for Micro-SOFC
2007. p. 157 - 160.Precise Thermography of Microsystems in the Visible Region using a Standard CCD Camera
2007. p. 926 - 929. DOI : 10.1109/ICSENS.2007.4388554.Optical beam steering using a 2D MEMS scanner
2007.Uniform Tilt-Angle Micromirror Array for Multi Object Spectroscopy
2007. MOEMS-MEMS 2007 Micro and Nanofabrication, San Jose, California, United States, 20-25 January 2007. DOI : 10.1117/12.702012.Micromirrors for Multiobject Spectroscopy: Large Array Actuation and Cryogenic Compatibility
2007. p. 87 - 88. DOI : 10.1109/OMEMS.2007.4373853.Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters
Sensors and Actuators A: Physical. 2007. DOI : 10.1016/j.sna.2006.07.023.Micro System Technologies for Implantable Applications: bi-stable MEMS switch
Université de Neuchâtel, 2007.Advanced temperature compensation for piezoresistive sensors based on crystallographic orientation
Review of Scientific Instruments. 2007. DOI : 10.1063/1.2722386.Optical MEMS for Future Instruments in Astronomy
2007. p. 191 - 192. DOI : 10.1109/OMEMS.2007.4373905.SH-SAW dual delay line based e-tongue system with improved discrimination capabilities
2007.In situ measurements of human articular cartilage stiffness by means of a scanning force microscope
Journal of Physics: Conference Series. 2007. DOI : 10.1088/1742-6596/61/1/094.Reliability improvement of suspended platinum-based micro-heating elements
Sensors and Actuators A: Physical. 2007. DOI : 10.1016/j.sna.2007.04.006.Potassium and calcium-selective microelectrode arrays
2007.Micro-hotplates-A platform for micro-solid oxide fuel cells
Journal of Power Sources. 2007. DOI : 10.1016/j.jpowsour.2006.12.072.Integration of MOX gas sensors on polyimide hotplates
Sensors and Actuators A: Physical. 2007. DOI : 10.1016/j.snb.2007.09.013.Gas Detection using a Micromachined FTIR Spectrometer
2007. p. 1364 - 1367. DOI : 10.1109/ICSENS.2007.4388665.Microsystem technologies for implantable applications
Journal of Micromechanics and Microengineering. 2007. DOI : 10.1088/0960-1317/17/5/R02.Computer simulation of ion-selective membrane electrodes and related systems by finite-difference procedures
Journal of Electroanalytical Chemistry. 2007. DOI : 10.1016/j.jelechem.2006.11.025.Direct integration of carbon nanotubes on micromachined hotplates
Nanoengineering and nanosystems. 2007. DOI : 10.1243/17403499JNN104.The FAMARS Instrument: An Atomic Force Micrscope for the PHOENIX Mission
2006.How much silicon can we put in mechanical watches?
2006.Implantable Hearing Systems: Development and Evaluation of Two Concepts
Université de Neuchâtel, 2006.Non-Piezoelectric Generation and Detection of High-Q Resonances in Acoustic Sensors
2006. p. 32 - 38.High-fill factor micro-mirror array for multi object spectroscopy
2006.NEMS Need MEMS
2006.Capteurs intégrés, historique et visions
2006.Design, Microfabrication and Characterization of MHD Pumps and their Applications in NMR Environments
Université de Neuchâtel, 2006.Microfabricated Platforms for the Study of Neuronal and Cellular Networks
2006.Electrical Conductivity of LSCF Thin Films for SOFC on Micro Hotplates
2006.Micro-hotplates on polyimide for sensors et actuators
Sensors and Actuators A: Physical. 2006. DOI : 10.1016/j.sna.2006.06.003.Atomic Force Microscope Setup for Combined Electrochemical and Topographical Experiments in Structural Biology
2006.Design and fabrication of nanofluidic devices by surfaces micromachining
Nanotechnology. 2006. DOI : 10.1088/0957-4484/17/10/010.Theoretical treatment and computer simulation of microelectrode arrays
Journal of Electroanalytical Chemistry. 2006. DOI : 10.1016/j.jelechem.2006.01.028.MEMS based Optical Cross Connects for Fiber Optical Communication
Université de Neuchâtel, 2006.Optical, Electrical and Mechanical Properties of the Tantalum Oxynitride Thin Films Deposited by Pulsing Reactive Gas Sputtering
2006.Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stress
2006. p. 82 - 83. DOI : 10.1109/OMEMS.2006.1708275.High Quality Micromachined Inductors for Integrated
Université de Neuchâtel, 2006.Application of ESEM in Microtechnology, Biotechnology and Forensic
2006.Scanning Probe with Tuning Fork Sensor, Microfabricated Silicon Cantilever and Conductive Tip for Microscopy at Cryogenic Temperature
Japanese Journal of Applied Physics. 2006. DOI : 10.1143/JJAP.45.1992.Wafer level hermetic package and device testing of a SOI-MEMS switch for biomedical applications
Journal of Micromechanics and Microengineering. 2006. DOI : 10.1088/0960-1317/16/4/002.High Fill-Factor Arrays of Flexure-Hinge Type Micromirrors for Multi Object Spectroscopy
2006. p. 48 - 49. DOI : 10.1109/OMEMS.2006.1708258.Development of a platform for the monitoring of extracellular ionic activities
2006.Micropipette-based K+ and Ca2+ selective electrodes
2006.Optical Read-out of Parallel Cantilever AFM arrays
2006.NEMS for MEMS
2006.The arthroscopic SFM
2006.Micro- and Nano Technologies in Switzerland
2006.In vivo stiffness measurements of human articular cartilage ny means of a scanning force microscope
2006.Optical, electrical and mechanical properties of the tantalum oxynitride thin films deposited by pulsing reactive gas sputtering
Thin Solid Films. 2006. DOI : 10.1016/j.tsf.2006.07.054.Cyro SEM: Application in Micro and Nanotechnology
2006.Study on integration of carbon nanotube on micro-hotplates
2006. p. 155 - 157.Scanning Probe Arrays for Liquid Operation
2006.Development of an Array of Ion-Selective Microelectrodes Aimed for the Monitoring of Extracellular Ionic Activities
Analytical Chemistry. 2006. DOI : 10.1021/ac0609733.Microfluidics/CMOS orthogonal capabilities for cell bilogy
Biomed Microdevices. 2006. DOI : 10.1007/s10544-006-7711-9.Vernieuwingen in mechanische en eletronische horloges
2006.In Situ Stiffness Measurements of Human Articular Cartilage
2006.Characterization of Microfabricated Probes for Combined Atomic Force and High-Resolution Scanning Electrochemical Microscopy
Analytical Chemistry. 2006. DOI : 10.1021/ac0521495.Local Oxidation of Titanium Using Dynamic-Mode Tuning-Fork Probe with Microfabricated Silicon Cantilever
Japanese Journal of Applied Physics. 2006. DOI : 10.1143/JJAP.45.2099.Magnetic direct generation of acoustic resonances in silicon membranes
Measurement Science and Technology. 2006. DOI : 10.1088/0957-0233/17/4/017.Space applications of micro hot plate chemical sensors
2006.Direct Integration of Carbon Nanotubes on Micro Gas Sensing Platforms
2006. p. 671 - 674. DOI : 10.1109/ICSENS.2007.355557.NEMS need MEMS
2006.Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors
2006. p. 139 - 144. DOI : 10.1109/FREQ.2006.275366.Sensing Protein Molecules Using Nanofabricated Pores
Applied Physics Letters. 2006. DOI : 10.1063/1.2180868.Optimization of the material composition of platinum micro-heating elements
2006. p. W1B - P1.Application of ECAP on Cu-Ag and Cu-Cr Alloys
2006.CVD deposited TA2O5 and HfO2 layers as pH-sensitive layers for ISFETs
2006.Wafer Level Packaging of Micromachined Gas Sensors
IEEE Sensors. 2006. DOI : 10.1109/JSEN.2006.881355.Scanning probe arrays for life sciences and nanobiology applications
2006. Micro and Nanoengineering MNE 2005, 31st International Conference on Micro- and Nano-Engineering, Vienna, Austria, 19-22 September 2005. p. 1698 - 1701. DOI : 10.1016/j.mee.2006.01.201.MEMS compatible micro-GRIN lenses for fiber to chip coupling of light
Optics Express. 2006. DOI : 10.1364/OE.14.004237.Topography Mediated Patterning of Inorganic Materials by Spray Pyrolysis
Advanced Materials. 2006. DOI : 10.1002/adma.200600718.Mems and Nanotechnologies for Space
2006.Characterization of a microfluidic dispensing system for localised stimulation of cellular networks
Lab on a Chip. 2006. DOI : 10.1039/b511768b.Microfabricated platforms for the study of neuronal and cellular networks
Journal of Physics: Conference Series. 2006. DOI : 10.1088/1742-6596/34/1/001.Application of carbon "Nano" powders and porous silicon for gas preconcentration
2006. p. W1A - P11.Paraffin-PDMS composite thermo microactuator with large vertical displacement capability
2006. p. 215 - 218.Metal oxide gas sensors on polyimide micro-hotplates
2006.Heterogeneous oligonucleotide-hybridization assay based on hot electron-induced eletrochemiluminescence of a rhodamine label at oxide-coated aluminium and silicon electrodes
Eletrochimica Acta. 2006. DOI : 10.1016/j.electacta.2006.02.017.Fabrication and electroosmotic flow measurements in micro- and nanofluidic channels
Journal of Microfluidics and Nanofluidics. 2006. DOI : 10.1007/s10404-005-0051-x.Electrochemiluminescent hybridization chip with electric field mismatch discrimination
Biosensors and Bioelectronics. 2006. DOI : 10.1016/j.bios.2006.02.013.Design, Simulation, Fabrication, and Characterization of a Digital Variable Optical Attenuator
Journal of Microelectromechanical Systems. 2006. DOI : 10.1109/JMEMS.2006.879699.Combined AFM-SECM Experiments with Microfabricated Conductive Cantilevers P.L.T.M. Frederix et al
2006.Piezoresistive Cantilever Array for Life Sciences Applications
2006.Solid Propellant Microthrusters on Silicon: Design, Modeling, Fabrication and Testing
Journal of Microelectromechanical Systems. 2006. DOI : 10.1109/JMEMS.2006.880232.Compatibility of screen-printing technology with micro-hotplate for gas sensor and solid oxide micro fuel cell development
Sensors and Actuators B: Chemical. 2006. DOI : 10.1016/j.snb.2006.04.031.Sensing Protein Molecules at Different pH using Nanofabricated Pores
2006.Highly integrated solid propellant micro-thrusters using SOI wafers
2006. p. 11013 - 6p..A microelectrode array (MEA) integrated with clustering structures for investigating in vitro neurodynamics in confined interconnected sub-populations of neurons
Sensors and Actuators B: Chemical. 2006. DOI : 10.1016/j.snb.2005.04.042.Matrix of 10 x 10 addressed solid propellant microthrusters: Review of the technologies
Sensors and Actuators A: Physical. 2006. DOI : 10.1016/j.sna.2005.08.024.Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes
Sensors and Actuators A: Physical. 2006. DOI : 10.1016/j.sna.2005.11.069.Scanning Probe with Tuning Fork Sensor, Microfabricated Silicon Cantilever and Conductive Tip for Microscopy at Cryogenic Temperature
2005.Filling Kinetics of Liquids in Nanochannels down to 27 nm Deep by Capillary Force
2005.Opportunities of Micro-and Nanotechnology(MNT) in instrumentation and communication
2005.MEMS Hotplates with TiN as a Heater Material
2005. p. 330 - 333. DOI : 10.1109/ICSENS.2005.1597703.Fast immobilization of probe beads by dielectrophoresis-controlled adhesion in a versatile microfluidic platform for affinity assay
Electrophoresis. 2005. DOI : 10.1002/elps.200500401.Design and Evaluation of a polyimide spring system for the scanning force microscope of the Phoenix Mars Mission 2007
2005. p. 281 - 287.Micromachining of thick Aluminium Films for RF Applications
2005.Magnetohydrodynamic Pumping In Nuclear Magnetic Environments
2005.Generic fabrication technology for transparent and suspend microfluidic and nanofluidic channels
2005. p. 1191 - 1194. DOI : 10.1109/SENSOR.2005.1497291.Micro - and Nanotechnology in Switzerland
2005.Compatibility of Screen-Printing Technology with Micro Hotplate for Gas Sensor and Solid Oxide Micro Fuel Cell Development
2005.Microfabrication and characterization of an ion-selective microelectrode array platform
Sensors and Actuators B: Chemical. 2005. DOI : 10.1016/S0925-4005(04)00112-1.Ta2O5 and HfO2 as ion-sensitive materials in ISFETs
2005. p. 183 - 188.Voltammetric microelectrode array for trace element monitoring in natural waters
2005.Polymeric Hotplates for Sensors and Actuators
2005.Towards a planar sample support for in situ experiments in structural biology
Microelectronic Engineering. 2005. DOI : 10.1016/j.mee.2004.12.072.Miniature Solid State Ion-Selective Electrodes with Solvent Polymeric Mebrane
2005.New Opportunities for Measurement Systems Thanks to New Trends in Space Laboratories
CHIMIA. 2005. DOI : 10.2533/000942905777676533.Electrochemiluminescent hybridization chip with electric field aided mismatch discrimination
2005.Electrochemical microchip for hybridization detection of DNA using ruthenium complex as a non-covalent label
2005.Local Oxidation of Titanium Using a Dynamic Mode Operated Tuning Fork Probe with Microfabricated Silicon Cantilever
2005.Post assembly alignment system
2005. p. 477 - 481.Scanning Force Endoscope
2005.Microactuators based on ion-implanted dielectric Electroactive Polymer Membranes (EAP)
2005. p. 2048 - 2051. DOI : 10.1109/SENSOR.2005.1497505.High-Performance Micromachined RF Planar Inductors
2005. p. 1084 - 1087. DOI : 10.1109/SENSOR.2005.1496644.High-density electrode array for imaging in vitro electrophysical activity
Biosensors and Bioelectronics. 2005. DOI : 10.1016/j.bios.2004.08.011.Microfluidics/CMOS Orthogonal Capabilities for Cell Biology
2005.MEMS compatible Micro-GRIN Lenses for in Plane Beam Manipulation
2005. p. 111 - 112. DOI : 10.1109/OMEMS.2005.1540103.IMT, 30 ans à l'avant-garde d'un domaine scientifique et technologique de pointe
2005.Nanofabrication of protein-patterned substrates for future cell adhesion experiments
Microelectronic Engineering. 2005. DOI : 10.1016/j.mee.2004.12.073.Filling Kinetics of Liquids in Nanochannels down to 27 nm Deep by Capillary Force
Journal of Colloid and Interface Sciences. 2005. DOI : 10.1016/j.jcis.2005.06.037.Generic technological platform for microfabricationg silicon nitride micro-and nanopipette arrays
Journal of Micromechanics and Microengineering. 2005. DOI : 10.1088/0960-1317/15/12/020.Titration-on-a-chip, chemical sensor-actuator systems from idea to commercial product
Sensors and Actuators B: Chemical. 2005. DOI : 10.1016/S0925-4005(04)00116-9.Influence of cationic and anionic additives on the electrical properties of ionophore-based ion-selective membranes
Journal of Electroanalytical Chemistry. 2005. DOI : 10.1016/j.jelechem.2005.04.029.Micro-Heat Generation for Chemical Reactions
2005.Metallo-organic low-pressure chemical vapor deposition of Ta2O5 using TaC12H30O5N as precursor for batch fabrication of microsystems
Thin Solid Films. 2005. DOI : 10.1016/j.tsf.2005.03.021.Miniaturisation Of Solid Propellant Thrusters For Space Application
2005. p. 736 - 741.Cr particle refinement in Cu alloy by ECAP
2005.Tunable microcavities in two dimensional photonic crystal waveguides
2005. p. 109 - 110. DOI : 10.1109/OMEMS.2005.1540102.Fast microarray functionalization with probe beads for lab-on-chip affinity assay
2005. p. 1054 - 1056.Microfabrication of SixNy micropipettes for biochemical applications
2005.Assessment of insulated conductive cantilevers for biology and electrochemistry
Nanotechnology. 2005. DOI : 10.1088/0957-4484/16/8/001.MEMS and opportunities for University/Industry Technology Transfer
2005.Integration of robust fluidic interconnects using metal to glass anodic bonding
Micromechanics and Microengineering. 2005. DOI : 10.1088/0960-1317/15/9/007.Quasi-dry Release for Micro Electro-Mechanical Systems
2005. p. 611 - 616.Laterally Moving Bistable MEMS DC Switch for Biomedical Applications
Journal of Microelectromechanical Systems. 2005. DOI : 10.1109/JMEMS.2005.851843.Microstructural Evolution of Cu Alloys During ECAP:Approach For Nanofilament Formation
2005.A high current density DC magnetohydrodynamic (MHD) micropump
Lab on a Chip. 2005. DOI : 10.1039/b417892k.Failure Analysis of Micro-Heating Elements Suspended on Thin Membranes
2005. 16th European Symposium Realibility of Electron Devices, Failure Physics and Analysis. p. 1786 - 1789. DOI : 10.1016/j.microrel.2005.07.106.Scanning Force Endoscope
2004.Application of Optical MEMS in Communication, Life Sciences and Instrumentations
2004.Neuchâtel: Transformation from Watch Industry to MEMS-based Cluster
2004.Microelectrodes Arrays (MEAs) for in-vitro Electrophysiology
2004. p. 84 - 85.Scanning Force Endoscope
2004.Laterally Moving Bi-Stable MEMS DC-Switch for Biomedical Applications
2004. p. 854 - 860.Technology and Applications of Micro Electro Mechanical Systems
2004.Scanning Force Endoscope
2004.Microsystems for bioanalytical applications
2004.MEMS tilting platform for filter tuning in optical telecom
2004. p. 10 - 11.MEMS Tilting Platform for Filter Tuning in Optical Telecom
2004. p. 253 - 254.Scanning Force Endoscope
2004.MEMS for Watches
2004.High-k Dielectrics for Use as ISFET Gate Oxides
2004. p. 677 - 680. DOI : 10.1109/ICSENS.2004.1426257.MEMS tunable filter for telecom applications
2004. Photonics Europe, Strasbourg, France. p. 240 - 251. DOI : 10.1117/12.545581.Modification of the surface roughness of platinum thin film electrodes by alloy formation with aluminium
2004.Fabrication and Measurement of a Circular Digital Variable Optical Attenuator
2004. p. 36 - 37.MEMS Opportunities & Challenges for Applied Research
2004.Two-Dimensional Massive Parallel Dispenser for Microarray Printing
Université de Neuchâtel, 2004.Novel 2D MEMS based Optical Beamsteerer
2004. p. 58 - 59.Scanning Force Endoscope
2004.Ion-Selective Microelectrode Array Platform for recording Calcium Ion Activities
2004.Development of microfluidic devices for chemical analysis and fluid handling
Université de Neuchâtel, 2004.Developments of MEA devices for studying complex cellular networkds dynamics in-vitro
2004.Development of Insulated Conductive Probes with Platinum Silicide Tips for Atomic Force Microscopy in Cell Biology
Japanese Journal of Applied Physics. 2004. DOI : 10.1143/JJAP.43.3865.Technology Transfer Opportunities for Chemical Measurement Systems inspired by the Space Bioreactor
2004.Nanofrabrication of Protein-Patterned Substrates for Future Cell Adhesion Experiments
2004.Fabrication of Nanochannels Using Photolithography and Partial Etching of Sacrificial Layer
2004. p. 309 - 311.A microfluidic platform using molecular beacon-based temperature calibration for thermal dehybridization of surface-bound DNA
Analytical Chemistry. 2004. DOI : 10.1021/ac034377+.Infra-red MEMS-based Lamellar Grating Spectrometer
2004. p. 1 - 8. DOI : 10.1117/12.545587.Electrochemiluminescence microfluid chip of heterogeneous assays
2004.Development of an electroless post-processing technique for depositing gold as electrode material on CMOS devices
Sensors and Actuators. 2004. DOI : 10.1016/j.snb.2003.12.078.The quenching of electrochemiluminescence upon oligonucleotide hybridization
Luminescence. 2004. DOI : 10.1002/bio.786.Scanning Force Endoscope
2004.Development of a multifunctional platform for cell cultures
2004.MEMS Opportunities & Challenges for Applied Research
2004. p. 37 - 76.Novel Dynamic Scanning Microscope Probe and its Application to Local Electrical Measurement in an Ion Sensitive Field Effect Transistor
2004. p. 011.1.1 - 011.1.6.Planar sample support for in situ Experiments in Structural Biology
2004.Manufacture and Characterization of an ISFET-probe for Deep-sea pH Measurements
2004. p. 730 - 731.Replication of optical MEMS structures in sol-gel materials
Microelectronic Engineering. 2004. DOI : 10.1016/S0167-9317(04)00091-7.Planar sample support for in situ Experiments in Structural Biology
2004.Active Pixels Sensor Array for imagning Electrophysiological Cellular Activity
2004.MEMS and Opportunities for University/Industry Technology Transfer
2004.Microelectrode arrays: materials, technology and applications
2004.A Highly Parallel Piezoelectric Printing Device for Micro-Array Technology
2004. p. 466 - 469. DOI : 10.1109/MEMS.2004.1290623.Scanning Force Endoscope
2004.Planar sample support for in situ Experiments in Structural Biology
2004.Sample preparation by means of electron beam lithography
2004.MEMS: Opportunities and Challenges for Applied Research at Universities
2004.Development of MicroHeaters on SOI for MicroIgnition Application
2004. p. 309 - 312.Introduction to Microtechnology
2004.Array of ion-selective microelectrodes designed for the detection of intracellular Ca2+ activities
2004.Current response of ion-selective solvent polymeric membranes at controlled potential
Journal of Electroanalytical Chemistry. 2004. DOI : 10.1016/j.jelechem.2004.04.009.4x4 & 8x8 Optical Cross connect for Fiber Optical Networks
2004. Photonics Europe, 2004, Strasbourg, France. p. 212 - 219. DOI : 10.1117/12.544915.Scanning Force Endoscope
2004.Characterization of a MEMS-based VIS and near-IR Lamellar Spectrometer
2004. p. 44 - 45.Silicon Liquid Flow Sensor Encapsulation using Metal to Glass Anodic Bonding
2004. p. 649 - 652.Using microtechnology to get to nanotechnology
Machine Design. 2004.Bonding properties of metals anodically bonded to glass
Sensors and Actuators A: Physical. 2004. DOI : 10.1016/j.sna.2003.10.070.A clean wafer-scale chip-release process without dicing based on vapor phase etching
2004. p. 717 - 720. DOI : 10.1109/MEMS.2004.1290685.Robust High Performance Planar Inductors on Glass Substrate
2004. p. 233 - 236.Role of Universities in Industrialization of MEMS Technology
2004.A high flow rate DC magnetohydrodynamic (MHD) micropumup
2004. p. 372 - 374.MEMS and Opportunities for University/Industry Technology Transfer
2004.Talk on MEMS for watches
2004. p. 147 - 168.From Chemical Sensors to Miniaturized Chemical Analysis Systems
2004.4x4 & 8x8 Optical Matrix Switch with 250 um Mirror Pitch
2004. p. 162 - 163.From Chemical Sensors to Miniaturize Chemical Analysis
2004.High Quality Monolithic Planar Inductors for Integrated Communications Systems
2004.Three-Dimensional SOI-MEMS Constructed by Buckled Bridges and Vertical Comb Drive Actuator
Selected Topics in quantum electronics. 2004. DOI : 10.1109/JSTQE.2004.830616.Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates
2004. p. 23 - 28.Hybridization assay based on the quenching of Ru(bpy) 3 2+ electrochemiluminescence by Cy5
2004.MEMS for Watches
2004. DOI : 10.1109/MEMS.2004.1290507.Fabrication of Nanochannels Systems by Surface Micromachining
2004.Microfabrication process for the realization of a matrix of solid-propellant microthrusters
2004. p. 260 - 277.Miniature lamellar grating interferometer based on silicon technology
Optics Letters. 2004. DOI : 10.1364/OL.29.001437.2021
Editorial: Modeling and Applications of Optoelectronic Devices for Access Networks
Frontiers In Physics. 2021. DOI : 10.3389/fphy.2021.678269.2016
Fully inkjet printed SnO2 gas sensor on plastic substrate
Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.042.Tubular gas preconcentrators based on inkjet printed micro-hotplates on foil
Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.121.Smart RFID Label with a Printed Multisensor Platform for Environmental Monitoring
Flexible and Printed Electronics. 2016. DOI : 10.1088/2058-8585/1/2/025003.2015
Preconcentration Modeling for the Optimization of a Micro Gas Preconcentrator Applied to Environmental Monitoring
Analytical Chemistry. 2015. DOI : 10.1021/acs.analchem.5b00400.Polylactic acid as a biodegradable material for all-solution-processed organic electronic devices
Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.11.010.Harvesting Energy From a Rotating Gear Using an AFM-Like MEMS Piezoelectric Frequency Up-Converting Energy Harvester
Journal of Microelectromechanical Systems. 2015. DOI : 10.1109/JMEMS.2014.2349794.Inkjet and microcontact printing of functional materials on foil for the fabrication of pixel-like capacitive vapor microsensors
Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.10.041.Silicon micromachined ultrasonic scalpel for the dissection and coagulation of tissue
Biomedical Microdevices. 2015. DOI : 10.1007/s10544-015-9981-6.Enzyme SU-8 microreactors: simple tools for cell-culture monitoring
Microfluidics and Nanofluidics. 2015. DOI : 10.1007/s10404-015-1562-8.Flip-chip integration of Si bare dies on polymeric substrates at low temperature using ICA vias made in dry film photoresist
Journal of Micromechanics and Microengineering. 2015. DOI : 10.1088/0960-1317/25/4/045013.Comparing membrane- and cantilever-based surface stress sensors for reproducibility
Sensors and Actuators A: Physical. 2015. DOI : 10.1016/j.sna.2015.02.039.2014
Multisite monitoring of choline using biosensor microprobe arrays in combination with CMOS circuitry
Biomedical Engineering-Biomedizinische Technik. 2014. DOI : 10.1515/bmt-2012-0098.Design and development of sensing RFID Tags on flexible foil compatible with EPC Gen 2
IEEE Sensors Journal. 2014. DOI : 10.1109/JSEN.2014.2335417.Mid-infrared spectroscopy for gases and liquids based on quantum cascade technologies
The Analyst. 2014. DOI : 10.1039/c3an01462b.In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments
Sensors and Actuators A: Physical. 2014. DOI : 10.1016/j.sna.2013.08.043.Microfabricated alkali vapor cell with anti-relaxation wall coating
Applied Physics Letters. 2014. DOI : 10.1063/1.4891248.Study of bending reliability and electrical properties of platinum lines on flexible polyimide substrates
Microelectronics Reliability. 2014. DOI : 10.1016/j.microrel.2014.06.015.Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation
Journal of Microelectromechanical Systems. 2014. DOI : 10.1109/Jmems.2014.2314702.Design optimization of vibration energy harvesters fabricated by lamination of thinned bulk-PZT on polymeric substrates
Smart Materials and Structures. 2014. DOI : 10.1088/0964-1726/23/4/045041.Forward osmosis in a portable device for automatic osmolality adjustment of environmental water samples evaluated by cell-based biosensors
Journal of Membrane Science. 2014. DOI : 10.1016/j.memsci.2013.12.041.Development of a New Generation of Ammonia Sensors on Printed Polymeric Hotplates
Analytical Chemistry. 2014. DOI : 10.1021/ac501908c.Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level
Sensors and Actuators A: Physical. 2014. DOI : 10.1016/j.sna.2014.01.032.Properties and Printability of Inkjet and Screen-Printed Silver Patterns for RFID Antennas
Journal Of Electronic Materials. 2014. DOI : 10.1007/s11664-013-2893-4.2013
Low-temperature thin-film indium bonding for reliable wafer-level hermetic MEMS packaging
Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/7/075007.An Automatic Test Bench for Complete Characterization of Vibration-Energy Harvesters
IEEE Transactions on Instrumentation and Measurement. 2013. DOI : 10.1109/TIM.2013.2265452.A portable lab-on-a-chip instrument based on MCE with dual topbottom capacitive coupled contactless conductivity detector in replaceable cell cartridge
Electrophoresis. 2013. DOI : 10.1002/elps.201200592.Foil-to-foil lamination and electrical interconnection of printed components on flexible substrates
Microelectronic Engineering. 2013. DOI : 10.1016/j.mee.2013.04.040.Microfluidic Droplet-Based Liquid–Liquid Extraction and On-Chip IR Spectroscopy Detection of Cocaine in Human Saliva
Analytical Chemistry. 2013. DOI : 10.1021/ac401606p.The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy
Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/5/055009.A miniature frequency-stabilized VCSEL system emitting at 795nm based on LTCC modules
Optics and Lasers in Engineering. 2013. DOI : 10.1016/j.optlaseng.2013.03.009.Fabrication and formation of Ta/Pt-Si ohmic contacts applied to high-temperature Through Silicon Vias (TSVs)
Sensors and Actuators A: Physical. 2013. DOI : 10.1016/j.sna.2012.11.025.A robust platform for textile integrated gas sensors
Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.snb.2012.11.099.A dual-axis pointing mirror with moving-magnet actuation
Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/2/025002.Double-Side-Coated Nanomechanical Membrane-Type Surface Stress Sensor (MSS) for One-Chip-One-Channel Setup
Langmuir. 2013. DOI : 10.1021/la3046719.Towards fully printed capacitive gas sensors on flexible PET substrates based on Ag interdigitated transducers with increased stability
Sensors and Actuators B: Chemical. 2013. DOI : 10.1016/j.snb.2012.11.025.Woven Temperature and Humidity Sensors on Flexible Plastic Substrates for E-Textile Applications
IEEE Sensors Journal. 2013. DOI : 10.1109/JSEN.2013.2257167.Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy
Optics Express. 2013. DOI : 10.1364/OE.21.022400.Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks
Journal of Applied Physics. 2013. DOI : 10.1063/1.4789942.Batch fabrication of gold-gold nanogaps by E-beam lithography and electrochemical deposition
Nanotechnology. 2013. DOI : 10.1088/0957-4484/24/23/235302.Decreasing the size of printed comb electrodes by the introduction of a dielectric interlayer for capacitive gas sensors on polymeric foil: Modeling and fabrication
Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.sob.2013.01.008.Effect of low-temperature processing on dry film photoresist properties for flexible electronics
Journal of Polymer Science Part B: Polymer Physics. 2013. DOI : 10.1002/polb.23240.Flexprint Substrate Enzyme Sensor for Determination of Daily Glucose-Profiles of Diabetic Patients
ECS Transactions. 2013. DOI : 10.1149/05012.0089ecst.Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensation
Journal of Micromechanics and Microengineering. 2013. DOI : 10.1088/0960-1317/23/2/025012.Theoretical and experimental study of the bending influence on the capacitance of interdigitated micro-electrodes patterned on flexible substrates
Journal Of Applied Physics. 2013. DOI : 10.1063/1.4829023.2012
Microfabricated rubidium vapour cell with a thick glass core for small-scale atomic clock applications
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/2/025013.Environmental monitoring with a multisensor platform on polyimide foil
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.095.Two-dimensional cantilever array with varying spring constants and tip radii for life-science applications
Micro & Nano Letters. 2012. DOI : 10.1049/mnl.2011.0467.Microfabricated chip-scale rubidium plasma light source for miniature atomic clocks
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 2012. DOI : 10.1109/TUFFC.2012.2214.All additive inkjet printed humidity sensors on plastic substrate
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.042.Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistors
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/8/085034.Residual Stress and Buckling Patterns of Free-standing Yttria-stabilized-zirconia Membranes Fabricated by Pulsed Laser Deposition
Fuel Cells. 2012. DOI : 10.1002/fuce.201200028.Development and validation of a low cost blood filtration element separating plasma from undiluted whole blood
Biomicrofluidics. 2012. DOI : 10.1063/1.3672188.Cocaine detection by a mid-infrared waveguide integrated with a microfluidic chip
Lab on a Chip. 2012. DOI : 10.1039/c2lc40601b.Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning
Advanced Functional Materials. 2012. DOI : 10.1002/adfm.201102789.Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting Devices
Smart Materials Research. 2012. DOI : 10.1155/2012/426048.Characterization and modelling of low-pressure rf discharges at 2–500 MHz for miniature alkali vapour dielectric barrier discharge lamps
Journal of Physics D : Applied Physics. 2012. DOI : 10.1088/0022-3727/45/50/505205.Study of laser-pumped double-resonance clock signals using a microfabricated cell
Physica Scripta. 2012. DOI : 10.1088/0031-8949/2012/T149/014013.Two Dimensional Array of Nanomechanical Membrane-type Surface Stress Sensor (MSS) with Improved Sensitivity
Sensors. 2012. DOI : 10.3390/s121115873.Label-free, direct DNA detection by means of a standard CMOS electronic chip
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.052.2011
Ignition and Combustion Behavior in Solid Propellant Microsystems Using Joule-Effect Igniters
Journal of Microelectromechanical Systems. 2011. DOI : 10.1109/JMEMS.2011.2167667.Drop-coated metal-oxide gas sensor on polyimide foil with reduced power consumption for wireless applications
Sensors and Actuators, B: Chemical. 2011. DOI : 10.1016/j.snb.2011.11.050.A micro gas preconcentrator with improved performance for pollution monitoring and explosives detection
Analytica Chimica Acta. 2011. DOI : 10.1016/j.aca.2010.12.039.Theoretical treatment and numerical simulation of potentiometric and amperometric enzyme electrodes and of enzyme reactors. Part 1: Steady-state concentration profiles, fluxes, and responses
Journal of Electroanalytical Chemistry. 2011. DOI : 10.1016/j.jelechem.2011.02.007.Spectral phase, amplitude, and spatial modulation from ultraviolet to infrared with a reflective MEMS pulse shaper
Optics Express. 2011. DOI : 10.1364/OE.19.007580.Norland optical adhesive (NOA81) microchannels with adjustable wetting behavior and high chemical resistance against a range of mid-infrared-transparent organic solvents
Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2011.02.005.Theoretical treatment and numerical simulation of potentiometric and amperometric enzyme electrodes and of enzyme reactors. Part 2: Time-dependent concentration profiles, fluxes, and responses
Journal of Electroanalytical Chemistry. 2011. DOI : 10.1016/j.jelechem.2011.02.006.Microcolumn with variable axis lens for large scan fields and pixel numbers
Microelectronic Engineering. 2011. DOI : 10.1016/j.mee.2010.12.120.Pattern transfer and post processing of complex nanostructures formed by e-beam exposure in PMMA
Microelectronic Engineering. 2011. DOI : 10.1016/j.mee.2011.02.012.Electrochemical oxidation of ammonia (NH4+/NH3) on thermally and electrochemically prepared IrO2 electrodes
Electrochimica Acta. 2011. DOI : 10.1016/j.electacta.2010.10.071.Polymeric foil optical waveguide with inkjet printed gas sensitive film for colorimetric sensing
Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2011.09.001.The measurement of biomechanical properties of porcine articular cartilage using atomic force microscopy
Archives of Histology and Cytology. 2011. DOI : 10.1679/aohc.72.251.Biosensor microprobes with integrated microfluidic channels for bi-directional neurochemical interaction
Journal of Neural Engineering. 2011. DOI : 10.1088/1741-2560/8/6/066001.Simultaneous neurochemical stimulation and recording using an assembly of biosensor silicon microprobes and SU-8 microinjectors
Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2010.01.034.Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude
Review Of Scientific Instruments. 2011. DOI : 10.1063/1.3606440.The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
Smart Materials and Structures. 2011. DOI : 10.1088/0964-1726/20/2/025015.Microfluidic Chips for Point-of-Care Immunodiagnostics
Advanced Materials. 2011. DOI : 10.1002/adma.201100464.2010
Theoretical treatment and numerical simulation of potential and concentration profiles in extremely thin non-electroneutral membranes used for ion-selective electrodes
Journal of Electroanalytical Chemistry. 2010. DOI : 10.1016/j.jelechem.2010.01.001.3D Assembly Using Au-Si Eutectic and Au-Au Thermocompression Wafer Level Bonding for M(O)EMS Device Fabrication
ECS Transactions. 2010. DOI : 10.1149/1.3483492.Capacitively coupled contactless conductivity detection with dual top-bottom cell configuration for microchip electrophoresis
Electrophoresis. 2010. DOI : 10.1002/elps.200900578.Continuous-flow multi-analyte biosensor cartridge with controllable linear response range
Lab on a Chip. 2010. DOI : 10.1039/c004851h.Investigation of hot roller embossing for microfluidic devices
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/1/015017.Implementation and characterization of a quartz tuning fork based probe consisted of discrete resonators for dynamic mode atomic force microscopy
Review of Scientific Instruments. 2010. DOI : 10.1063/1.3455219.Enzyme-based choline and l-glutamate biosensor electrodes on silicon microprobe arrays
Biosensors and Bioelectronics. 2010. DOI : 10.1016/j.bios.2010.07.073.Foil level packaging of a chemical gas sensor
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055026.Epitaxial piezoelectric MEMS on silicon
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055008.Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications
Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.10.009.A novel enzyme entrapment in SU-8 microfabricated films for glucose micro-biosensors
Biosensors and Bioelectronics. 2010. DOI : 10.1016/j.bios.2010.07.117.Micro gas preconcentrator in porous silicon filled with a carbon absorbent
Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.05.054.Miniaturized Fourier transform spectrometer for gas detection in the MIR region
Sensors and Actuators B. 2010. DOI : 10.1016/j.snb.2010.03.050.Integration of a Fabrication Process for an Aluminum Single-Electron Transistor and a Scanning Force Probe for Tuning-Fork-Based Probe Microscopy
Journal of Microelectromechanical Systems. 2010. DOI : 10.1109/JMEMS.2010.2067198.Ultraviolet and near-infrared femtosecond temporal pulse shaping with a new high-aspect-ratio one-dimensional micromirror array
Optics Letters. 2010. DOI : 10.1364/OL.35.003102.Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/21/1/015014.Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic Characteristics
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING. 2010. DOI : 10.1002/tee.20507.Evaluation of static measurement in piezoelectric cantilever sensors using a charge integration technique for chemical and biological detection
Measurement Science and Technology. 2010. DOI : 10.1088/0957-0233/21/7/075801.Fabrication and characterization of linear diffusers based on concave micro lens arrays
Optics Express. 2010. DOI : 10.1364/OE.18.014251.Advanced Scanning Probes for Micro-Nano Science Researches
IEEJ Transactions On Electrical And Electronic Engineering. 2010. DOI : 10.1002/tee.20527.2009
Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 1. Optical absorptivity
Sensors and Actuators A: Physical. 2009. DOI : 10.1016/j.sna.2008.12.023.Temperature, humidity and gas sensors integrated on plastic foil for low power applications
Sensors and Actuators B: Chemical. 2009. DOI : 10.1016/j.snb.2009.04.019.Microcolumn design for a large scan field and pixel number
Journal of Vacuum Science & Technology B. 2009. DOI : 10.1116/1.3256265.Scanning gate microscopy measurements on a superconducting single-electron transistor
Physical Review B. 2009. DOI : 10.1103/PhysRevB.79.134530.Evaluation of pH indicator-based colorimetric films for ammonia detection using optical waveguides
Sensors and Actuators B: Chemical. 2009. DOI : 10.1016/j.snb.2009.08.049.Memory effects of ion-selective electrodes: Theory and computer simulation of the time-dependent potential response to multiple sample changes
Journal of Electroanalytical Chemistry. 2009. DOI : 10.1016/j.jelechem.2009.05.004.Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 2. Thermal property and sensitivity
Sensors and Actuators A: Physical. 2009. DOI : 10.1016/j.sna.2008.12.024.2008
Conductive supports for combined AFM–SECM on biological membranes
Nanotechnology. 2008. DOI : 10.1088/0957-4484/19/38/384004.Label-Free Dectection of Single Protein Molecules and Protein-Protein Interactions using Synthetic Nanopores
Analytical Chemistry. 2008. DOI : 10.1021/ac7025207.Thermally activated solvent bonding of polymers
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems. 2008. DOI : 10.1007/s00542-007-0459-1.Localized Growth and Integration of Carbon Nanotubes on Micro-Hotplates
Journal of the Korean Physical Society. 2008. DOI : 10.3938/jkps.52.1378.Dynamic and static thermal study of micromachined heaters: the advantages of visible and near-infrared thermography compared to classical methods
Journal of Micromechanics and Microengineering. 2008. DOI : 10.1088/0960-1317/18/6/065005.Computer simulation and theory of the diffusion-and flow-induced concentration dispersion in microfluidic devices and HPLC systems based on rectangular microchannels
Analytica Chimica Acta. 2008. DOI : 10.1016/j.aca.2008.05.063.Microhotplates with TiN heaters
Sensors and Actuators A: Physical. 2008. DOI : 10.1016/j.sna.2008.08.016.Potentiometric platform for the quantification of cellular potassium efflux
Lab on a Chip. 2008. DOI : 10.1039/b801042k.2007
Application of carbon nano-powders for a gas micro-preconcentrator
Sensors and Actuators B: Chemical. 2007. DOI : 10.1016/j.snb.2007.07.029.Micro- and nanosystems for biology and medicine
Microelectronic Engineering. 2007. DOI : 10.1016/j.mee.2007.01.244.Piezoresistive scanning probe arrays for operation in liquids
Journal of Physics: Conference Series. 2007. DOI : 10.1088/1742-6596/61/1/002.Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System
Japanese Journal of Applied Physics. 2007. DOI : 10.1143/JJAP.46.6458.Piezoresistive cantilever array for life sciences applications
Journal of Physics: Conference Series. 2007. DOI : 10.1088/1742-6596/61/1/189.Magnetohydrodynamic pumping in nuclear magnetic resonance environments
Sensors and Actuators B: Chemical. 2007. DOI : 10.1016/j.snb.2006.09.026.Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters
Sensors and Actuators A: Physical. 2007. DOI : 10.1016/j.sna.2006.07.023.Advanced temperature compensation for piezoresistive sensors based on crystallographic orientation
Review of Scientific Instruments. 2007. DOI : 10.1063/1.2722386.In situ measurements of human articular cartilage stiffness by means of a scanning force microscope
Journal of Physics: Conference Series. 2007. DOI : 10.1088/1742-6596/61/1/094.Reliability improvement of suspended platinum-based micro-heating elements
Sensors and Actuators A: Physical. 2007. DOI : 10.1016/j.sna.2007.04.006.Micro-hotplates-A platform for micro-solid oxide fuel cells
Journal of Power Sources. 2007. DOI : 10.1016/j.jpowsour.2006.12.072.Integration of MOX gas sensors on polyimide hotplates
Sensors and Actuators A: Physical. 2007. DOI : 10.1016/j.snb.2007.09.013.Microsystem technologies for implantable applications
Journal of Micromechanics and Microengineering. 2007. DOI : 10.1088/0960-1317/17/5/R02.Computer simulation of ion-selective membrane electrodes and related systems by finite-difference procedures
Journal of Electroanalytical Chemistry. 2007. DOI : 10.1016/j.jelechem.2006.11.025.Direct integration of carbon nanotubes on micromachined hotplates
Nanoengineering and nanosystems. 2007. DOI : 10.1243/17403499JNN104.2006
Micro-hotplates on polyimide for sensors et actuators
Sensors and Actuators A: Physical. 2006. DOI : 10.1016/j.sna.2006.06.003.Design and fabrication of nanofluidic devices by surfaces micromachining
Nanotechnology. 2006. DOI : 10.1088/0957-4484/17/10/010.Theoretical treatment and computer simulation of microelectrode arrays
Journal of Electroanalytical Chemistry. 2006. DOI : 10.1016/j.jelechem.2006.01.028.Scanning Probe with Tuning Fork Sensor, Microfabricated Silicon Cantilever and Conductive Tip for Microscopy at Cryogenic Temperature
Japanese Journal of Applied Physics. 2006. DOI : 10.1143/JJAP.45.1992.Wafer level hermetic package and device testing of a SOI-MEMS switch for biomedical applications
Journal of Micromechanics and Microengineering. 2006. DOI : 10.1088/0960-1317/16/4/002.Optical, electrical and mechanical properties of the tantalum oxynitride thin films deposited by pulsing reactive gas sputtering
Thin Solid Films. 2006. DOI : 10.1016/j.tsf.2006.07.054.Development of an Array of Ion-Selective Microelectrodes Aimed for the Monitoring of Extracellular Ionic Activities
Analytical Chemistry. 2006. DOI : 10.1021/ac0609733.Microfluidics/CMOS orthogonal capabilities for cell bilogy
Biomed Microdevices. 2006. DOI : 10.1007/s10544-006-7711-9.Characterization of Microfabricated Probes for Combined Atomic Force and High-Resolution Scanning Electrochemical Microscopy
Analytical Chemistry. 2006. DOI : 10.1021/ac0521495.Local Oxidation of Titanium Using Dynamic-Mode Tuning-Fork Probe with Microfabricated Silicon Cantilever
Japanese Journal of Applied Physics. 2006. DOI : 10.1143/JJAP.45.2099.Magnetic direct generation of acoustic resonances in silicon membranes
Measurement Science and Technology. 2006. DOI : 10.1088/0957-0233/17/4/017.Sensing Protein Molecules Using Nanofabricated Pores
Applied Physics Letters. 2006. DOI : 10.1063/1.2180868.Wafer Level Packaging of Micromachined Gas Sensors
IEEE Sensors. 2006. DOI : 10.1109/JSEN.2006.881355.MEMS compatible micro-GRIN lenses for fiber to chip coupling of light
Optics Express. 2006. DOI : 10.1364/OE.14.004237.Topography Mediated Patterning of Inorganic Materials by Spray Pyrolysis
Advanced Materials. 2006. DOI : 10.1002/adma.200600718.Characterization of a microfluidic dispensing system for localised stimulation of cellular networks
Lab on a Chip. 2006. DOI : 10.1039/b511768b.Microfabricated platforms for the study of neuronal and cellular networks
Journal of Physics: Conference Series. 2006. DOI : 10.1088/1742-6596/34/1/001.Heterogeneous oligonucleotide-hybridization assay based on hot electron-induced eletrochemiluminescence of a rhodamine label at oxide-coated aluminium and silicon electrodes
Eletrochimica Acta. 2006. DOI : 10.1016/j.electacta.2006.02.017.Fabrication and electroosmotic flow measurements in micro- and nanofluidic channels
Journal of Microfluidics and Nanofluidics. 2006. DOI : 10.1007/s10404-005-0051-x.Electrochemiluminescent hybridization chip with electric field mismatch discrimination
Biosensors and Bioelectronics. 2006. DOI : 10.1016/j.bios.2006.02.013.Design, Simulation, Fabrication, and Characterization of a Digital Variable Optical Attenuator
Journal of Microelectromechanical Systems. 2006. DOI : 10.1109/JMEMS.2006.879699.Solid Propellant Microthrusters on Silicon: Design, Modeling, Fabrication and Testing
Journal of Microelectromechanical Systems. 2006. DOI : 10.1109/JMEMS.2006.880232.Compatibility of screen-printing technology with micro-hotplate for gas sensor and solid oxide micro fuel cell development
Sensors and Actuators B: Chemical. 2006. DOI : 10.1016/j.snb.2006.04.031.A microelectrode array (MEA) integrated with clustering structures for investigating in vitro neurodynamics in confined interconnected sub-populations of neurons
Sensors and Actuators B: Chemical. 2006. DOI : 10.1016/j.snb.2005.04.042.Matrix of 10 x 10 addressed solid propellant microthrusters: Review of the technologies
Sensors and Actuators A: Physical. 2006. DOI : 10.1016/j.sna.2005.08.024.Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes
Sensors and Actuators A: Physical. 2006. DOI : 10.1016/j.sna.2005.11.069.2005
Fast immobilization of probe beads by dielectrophoresis-controlled adhesion in a versatile microfluidic platform for affinity assay
Electrophoresis. 2005. DOI : 10.1002/elps.200500401.Microfabrication and characterization of an ion-selective microelectrode array platform
Sensors and Actuators B: Chemical. 2005. DOI : 10.1016/S0925-4005(04)00112-1.Towards a planar sample support for in situ experiments in structural biology
Microelectronic Engineering. 2005. DOI : 10.1016/j.mee.2004.12.072.New Opportunities for Measurement Systems Thanks to New Trends in Space Laboratories
CHIMIA. 2005. DOI : 10.2533/000942905777676533.High-density electrode array for imaging in vitro electrophysical activity
Biosensors and Bioelectronics. 2005. DOI : 10.1016/j.bios.2004.08.011.Nanofabrication of protein-patterned substrates for future cell adhesion experiments
Microelectronic Engineering. 2005. DOI : 10.1016/j.mee.2004.12.073.Filling Kinetics of Liquids in Nanochannels down to 27 nm Deep by Capillary Force
Journal of Colloid and Interface Sciences. 2005. DOI : 10.1016/j.jcis.2005.06.037.Generic technological platform for microfabricationg silicon nitride micro-and nanopipette arrays
Journal of Micromechanics and Microengineering. 2005. DOI : 10.1088/0960-1317/15/12/020.Titration-on-a-chip, chemical sensor-actuator systems from idea to commercial product
Sensors and Actuators B: Chemical. 2005. DOI : 10.1016/S0925-4005(04)00116-9.Influence of cationic and anionic additives on the electrical properties of ionophore-based ion-selective membranes
Journal of Electroanalytical Chemistry. 2005. DOI : 10.1016/j.jelechem.2005.04.029.Metallo-organic low-pressure chemical vapor deposition of Ta2O5 using TaC12H30O5N as precursor for batch fabrication of microsystems
Thin Solid Films. 2005. DOI : 10.1016/j.tsf.2005.03.021.Assessment of insulated conductive cantilevers for biology and electrochemistry
Nanotechnology. 2005. DOI : 10.1088/0957-4484/16/8/001.Integration of robust fluidic interconnects using metal to glass anodic bonding
Micromechanics and Microengineering. 2005. DOI : 10.1088/0960-1317/15/9/007.Laterally Moving Bistable MEMS DC Switch for Biomedical Applications
Journal of Microelectromechanical Systems. 2005. DOI : 10.1109/JMEMS.2005.851843.A high current density DC magnetohydrodynamic (MHD) micropump
Lab on a Chip. 2005. DOI : 10.1039/b417892k.2004
Development of Insulated Conductive Probes with Platinum Silicide Tips for Atomic Force Microscopy in Cell Biology
Japanese Journal of Applied Physics. 2004. DOI : 10.1143/JJAP.43.3865.A microfluidic platform using molecular beacon-based temperature calibration for thermal dehybridization of surface-bound DNA
Analytical Chemistry. 2004. DOI : 10.1021/ac034377+.Development of an electroless post-processing technique for depositing gold as electrode material on CMOS devices
Sensors and Actuators. 2004. DOI : 10.1016/j.snb.2003.12.078.The quenching of electrochemiluminescence upon oligonucleotide hybridization
Luminescence. 2004. DOI : 10.1002/bio.786.Replication of optical MEMS structures in sol-gel materials
Microelectronic Engineering. 2004. DOI : 10.1016/S0167-9317(04)00091-7.Current response of ion-selective solvent polymeric membranes at controlled potential
Journal of Electroanalytical Chemistry. 2004. DOI : 10.1016/j.jelechem.2004.04.009.Using microtechnology to get to nanotechnology
Machine Design. 2004.Bonding properties of metals anodically bonded to glass
Sensors and Actuators A: Physical. 2004. DOI : 10.1016/j.sna.2003.10.070.Three-Dimensional SOI-MEMS Constructed by Buckled Bridges and Vertical Comb Drive Actuator
Selected Topics in quantum electronics. 2004. DOI : 10.1109/JSTQE.2004.830616.2003
Optimization of the Composition of Interfaces in Miniature Planar Chloride Electrodes
Eletroanalysis. 2003. DOI : 10.1002/elan.200302816.Chemical and physical processes for integrated temperature control in microfluidic devices
Lab on a Chip. 2003. DOI : 10.1039/b210629a.Modulated operating temperature for MOSFET gas sensors: hydrogen recovery time reduction and gas discrimination
Sensors and Actuators B: Chemical. 2003. DOI : 10.1016/S0925-4005(03)00230-2.Electrokinetic characterization of poly(dimethylsiloxane) microchannels
Electrophoresis. 2003. DOI : 10.1002/elps.200305624.Covalently Bound Plasticized PVC Membranes for Solid State Ion-Selective Devices
CHIMIA. 2003. DOI : 10.2533/000942903777678704.Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy
Review of Scientific Instruments. 2003. DOI : 10.1063/1.1523631.Self-sensing and self-actuating probe based on quartz tuning fork combined with microfabricated cantilever for dynamic mode atomic force microscopy
Applied Surface Science. 2003. DOI : 10.1016/S0169-4332(02)01471-X.Planar microcoil-based microfluidic NMR probes
Journal of Magnetic Resonance. 2003. DOI : 10.1016/S1090-7807(03)00151-4.Rectangular channels for lab-on-a-chip applications
Microelectronic Engineering. 2003. DOI : 10.1016/S0167-9317(03)00148-5.Nanoscale dispensing of liquids through cantilevered probes
MicroElectronic Engineering. 2003. DOI : 10.1016/S0167-9317(03)00126-6.Using Matrix Peaks to Map Topography: Increased Mass Resolution and Enhanced Sensitivity in Chemical Imaging
Analytical Chemistry. 2003. DOI : 10.1021/ac034401j.High-Quality RF MEMS for Integrated Communication Systems
CSEM Scientific and Technical Report. 2003.Polyimide membrane with ZnO piezoelectric thin film pressure transducers as a differential pressure liquid flow sensor
Journal of Micromechanics and Microengineering. 2003. DOI : 10.1088/0960-1317/13/4/317.2002
Thermal optimization of micro-hotplates that have a silicon island
Journal of Micromechanics and Microengineering. 2002. DOI : 10.1088/0960-1317/12/6/330.A microchip electrophresis system with integrated in-plane electrodes for contactless conductivity detection
Electrophoresis. 2002. DOI : 10.1002/1522-2683(200211)23:21<3769::AID-ELPS3769>3.0.CO;2-E.Reducing the interference from CO2 or organic acids in ion-selective polymer membrane sensors having a field-effect transistor as internal reference element
Analytica Chimica Acta. 2002. DOI : 10.1016/S0003-2670(02)00475-0.Sample pretreatment on microfabricated devices
Talanta. 2002. DOI : 10.1016/S0039-9140(01)00593-8.Microfabricated Electrical Connector for Atomic Force Microscopy Probes with Integrated Sensor/Actuator
Japanese Journal of Applied Physics. 2002. DOI : 10.1143/JJAP.41.4332.An Integrated Fritless Colum for On-Chip Capillary Electrochromatography with Conventional Stationary Phases
Analytical Chemistry. 2002. DOI : 10.1021/ac0109467.Performance of an Integrated Microoptical System for Fluorescence Detection in Microfluidic Systems
Analytical Chemistry. 2002. DOI : 10.1021/ac0112465.Applications of SOI-based optical MEMS
IEEE Journal on Selected Topics in Quantum Electronics. 2002. DOI : 10.1109/2944.991410.Indirect eletro-osmotic pumping
Journal Assoc. Lab. Automation. 2002. DOI : 10.1016/S1535-5535(04)00195-9.Analysis of Lipoproteins by Capillary Zone Electrophoresis in Microfluidic Devices: Assey Development and Surfaces Roughness Measurements
Analytical Chemistry. 2002. DOI : 10.1021/ac011096y.Low-density lipoprotein analysis in microchip capillary electrophoresis systems
Electrophoresis. 2002. DOI : 10.1002/1522-2683(200210)23:20<3615::AID-ELPS3615>3.0.CO;2-J.Effects of controlled current on the response behavior of polymeric membrane ion-selective electrodes
Journal of Electroanalytical Chemistry. 2002. DOI : 10.1016/S0022-0728(02)00756-8.Application of surface biopassivated disposable poly(dimenthylsiloxane)/glass chips to a heterogeneous competitive human serum immunoglobulin G immunoassy with incorporated internal standard
Electrophoresis. 2002. DOI : 10.1002/1522-2683(200203)23:5<740::AID-ELPS740>3.0.CO;2-7.Detecting single molecules launched for liquid surfaces in a time-of-flight mass spectrometer using ultraviolet and infrared lasers
Proteomics. 2002. DOI : 10.1002/1615-9861(200204)2:4<436::AID-PROT436>3.0.CO;2-I.Immobilization of Biomolecules on Polyurethane Membrane Surfaces
Bioconjugate Chem. 2002. DOI : 10.1021/bc015515+.Measurement of quartz particles by means of an atomic force microscope for planetary exploration
Surf. Interface Anal.. 2002. DOI : 10.1002/sia.1182.Fast driving technique for integrated thermal bimorph actuator toward high-throughput atomic-force microscopy
Review of Scientific Instruments. 2002. DOI : 10.1063/1.1488148.2001
Microelectrode Arrays Based (Bio)analytical Systems
Biocybernetics and Biomedical Engineering. 2001.Fabrication of multilayer systems combining microfluidic and micro-optical elements for fluorescence detection
Journal of Microelectromechanical Systems. 2001. DOI : 10.1109/84.967369.Local pH-controlled reactivity investigations by thin-layer scanning tunneling microscopy
Electrochimica Acta. 2001. DOI : 10.1016/S0013-4686(01)00579-5.Micromachined photoplastic probe for scanning near-field optical microscopy
Review of Scientific Instruments. 2001. DOI : 10.1063/1.1394182.Thermally isolated MOSFET for gas sensing application
IEEE Electron Device Letters. 2001. DOI : 10.1109/55.892428.Sample preconcentration by field amplification stacking for microchip-based capillary electrophoresis
Electrophoresis. 2001. DOI : 10.1002/1522-2683(200101)22:2<258::AID-ELPS258>3.0.CO;2-4.Partial electroosmotic pumping in complex capillary systems - Part 1: Principles and general theoretical approach
Sensors and Actuators B: Chemical. 2001. DOI : 10.1016/S0925-4005(00)00673-0.Electrokinetically driven microfluidic chips with surface-modified chambers for heterogeneous immunoassays
Analytical Chemistry. 2001. DOI : 10.1021/ac0015366.Microlens systems for fluorescence detection in chemical microsystems
Optical Engineering. 2001. DOI : 10.1117/1.1359522.Partial electroosmotic pumping in complex capillary systems - Part 2: Fabrication and application of a micro total analysis system (mTAS) suited for continuous volumetric nanotitrations
Sensors and Actuators B: Chemical. 2001. DOI : 10.1016/S0925-4005(00)00674-2.A polymer gate FET sensor array for detecting organic vapours
Sensors and Actuators B: Chemical. 2001. DOI : 10.1016/S0925-4005(01)00687-6.Chemical sensing using an integrated microfluidic system based on the Berthelot reaction
Sensors and Actuators B: Chemical. 2001. DOI : 10.1016/S0925-4005(01)00573-1.Surface biopassivation of replicated poly(dimethylsiloxane) microfluidic channels and application to heterogeneous immunoreaction with on-chip fluorescence detection
Analytical Chemistry. 2001. DOI : 10.1021/ac010421e.Fabrication and characterization of a silicon cantilever probe with an integrated quartz-glass (fused-silica) tip for scanning near-field optical microscopy
Applied Optics. 2001. DOI : 10.1364/AO.40.005040.Making use of ion fluxes through potentiometric sensor membranes: ISEs with step responses at critical ion activities
Sensors and Actuators B: Chemical. 2001. DOI : 10.1016/S0925-4005(01)00592-5.Multi-layer microfluidic glass chips for microanalytical applications
Journal of Analytical Chemistry. 2001. DOI : 10.1007/s002160101004.Near-field optical microscopy based on microfabricated probes
Journal of Microscopy. 2001. DOI : 10.1046/j.1365-2818.2001.00880.x.Lithographically defined polymer tips for quartz tuning fork based scanning force microscopes
Microelectronic Engineering. 2001. DOI : 10.1016/S0167-9317(01)00482-8.Soft and rigid two-level microfluidic networks for patterning surfaces
Journal of Micromechanics and Microengineering. 2001. DOI : 10.1088/0960-1317/11/5/314.2000
Conical diamond tips realized by a double-molding process for high-resolution profilometry and atomic force microscopy applications
Applied Physics Letters. 2000. DOI : 10.1063/1.126115.All-photoplastic, soft cantilever cassette probe for scanning force microscopy
Journal of Vacuum Science Technology. 2000. DOI : 10.1116/1.591248.Potential drifts of solic-contacted ion-selective electrodes due to zero-current ion fluxes through the sensor membrane
Electroanalysis. 2000. DOI : 10.1002/1521-4109(200011)12:16<1286::AID-ELAN1286>3.0.CO;2-Q.Femtoliter injector for DNA mass spectrometry
Sensors and Actuators B: Chemical. 2000. DOI : 10.1016/S0925-4005(00)00354-3.Triangle-programmed coulometric nanotitration completed by continuous flow with porentiometric detection
Analytical Chemistry. 2000. DOI : 10.1021/ac990488q.Micro-electromechanical systems for nanoscience
Journal of Nanoparticle Research. 2000. DOI : 10.1023/A:1010026531885.A low-power micromachined MOSFET gas sensor
Journal of Microelectromechanical Systems. 2000. DOI : 10.1109/84.870055.Integrated atomic force microscopy array probe with metal-oxide-semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal-oxide-semiconductor electronics
Journal Vacuum Scientific Technology. 2000. DOI : 10.1116/1.1327299.Atomic force microscopy using an integrated comb-shape electrostatic actuator for high-speed feedback motion
Applied Physics Letters. 2000. DOI : 10.1063/1.126549.Calculated effects of membrane transport on the long-term response behavior of polymeric membrane ion-selective electrodes
The Journal of Physical Chemistry B. 2000. DOI : 10.1021/jp000655m.Microfabrication of Pt-tip microelectrodes
Sensors and Actuators B: Chemical. 2000. DOI : 10.1016/S0925-4005(00)00553-0.Microfabrication of a combined AFM-SNOM sensor
Ultramicroscopy. 2000. DOI : 10.1016/S0304-3991(99)00122-9.Enzymatic microreactor using Si, glass and EPON SU-8
Biomedical Microdevices. 2000. DOI : 10.1023/A:1009972210811.Near-field fluorescence imaging with 32 nm resolution based on microfabricated cantilevered probes
Applied Physics Letters. 2000. DOI : 10.1063/1.1330571.Reproducible fabrication of an array of gas-sensitive chemo-resistors with commercially available polyaniline
Sensors and Actuators B: Chemical. 2000. DOI : 10.1016/S0925-4005(00)00453-6.Microreactor and electrochemical detectors fabricated using Si and EPON SU-8
Sensors and Actuators B: Chemical. 2000. DOI : 10.1016/S0925-4005(99)00500-6.Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors
Sensors and Actuators B: Chemical. 2000. DOI : 10.1016/S0925-4005(00)00433-0.1999
Mounting of micromachined diamond tips and cantilevers
Surfaces and Interface Analysis. 1999. DOI : 10.1002/(SICI)1096-9918(199905/06)27:5/6<296::AID-SIA497>3.0.CO;2-E.Microfabricated double layer octupoles for microcolumn applications
Microelectronic Engineering. 1999. DOI : 10.1016/S0167-9317(99)00118-5.High aspect ratio UV photolithography for electroplated structures
Journal of Micromechanics and Microengineering. 1999. DOI : 10.1088/0960-1317/9/2/001.The development of a Nafion based amperometric carbon monoxide sensor for domestic safety
ANALUSIS. 1999. DOI : 10.1051/analusis:1999270347.Wafer- and piece-wise Si tip transfer technologies for applications in scanning probe microscopy
Journal of Microelectromechanical Systems. 1999. DOI : 10.1109/84.749404.Reagentless sensor integrating electrodes, photodetector, and immobilized Co-substrate for electrochemiluminescence-based assay
Electroanalysis. 1999. DOI : 10.1002/(SICI)1521-4109(199912)11:18<1361::AID-ELAN1361>3.0.CO;2-C.Effects of ion transport on the potential response of ionophore-based membrane electrodes: a theoretical approach
The Journal of Physical Chemistry B. 1999. DOI : 10.1021/jp9926443.Micro-opto-mechanical 2 x 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation
Journal of Lightwave Technology. 1999. DOI : 10.1109/50.737413.Redox-cycling type electrochemiluminescence in aqueous medium. A new principle for the detection of proteins labeled with a ruthenium chelate
Journal of Electroanalytical Chemistry. 1999. DOI : 10.1016/S0022-0728(99)00351-4.Reflective duplexer based on silicon micromechanics for fiber-optic communication
Journal of Lightwave Technology. 1999. DOI : 10.1109/50.737430.Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation
Journal of Microelectromechanical Systems. 1999. DOI : 10.1109/84.788627.A variable optical attenuator based on silicon micromechanics
IEEE Photonics Technology Letters. 1999. DOI : 10.1109/68.740714.Micromechanical relay with electrostatic actuation and metallic contacts
Journal of Micromechanics and Microengineering. 1999. DOI : 10.1088/0960-1317/9/4/307.Micromachined SPM probes with sub-100 nm features at tip apex
Surface and Interface Analysis. 1999. DOI : 10.1002/(SICI)1096-9918(199905/06)27:5/6<299::AID-SIA510>3.0.CO;2-V.Gas-dependent field effect transistor with an electrodeposited conducting polymer gate contact
Electrochemical and Solid-State Letters. 1999. DOI : 10.1149/1.1390761.Towards better scanning near-field optical microscopy probes - progress and new developments
Journal of Microscopy. 1999. DOI : 10.1046/j.1365-2818.1999.00567.x.Microfabricated chemical analysis systems for environmental applications
Biosensors and Bioarrays. 1999.Interferometric measurements of the position of a macroscopic body: Towards observation of quantum limits
Physical Review A. 1999. DOI : 10.1103/PhysRevA.59.1038.Introduction to the issue on microoptoelectromechanical systems (MOEMS)
IEEE Journal of Selected Topics in Quantum Electronics. 1999. DOI : 10.1109/JSTQE.1999.748097.A numerical simulation on a pneumatic air table realized by micro-EDM
Journal of Microelectromechanical Systems. 1999. DOI : 10.1109/84.809068.Integrated sensor for continuous flow electrochemiluminescent measurements of codeine with different ruthenium complexes
Analytica Chimica Acta. 1999. DOI : 10.1016/S0003-2670(99)00251-2.Soft, entirely photoplastic probes for scanning force microscopy
Review of Scientific Instruments. 1999. DOI : 10.1063/1.1149767.1998
Silicon micromechanics for the fiber-optic information highway
Sensors and Materials. 1998.Surface-micromachined Ta-Si-N beams for use in micromechanics
Journal of Micromechanics and Microengineering. 1998. DOI : 10.1088/0960-1317/8/2/011.A pneumatic air table realized by microelectro-discharge machining
Journal of Microelectromechanical Systems. 1998. DOI : 10.1109/84.735345.Fabrication of metallic probes by a new technology based on double molding
Microelectronic Engineering. 1998. DOI : 10.1016/S0167-9317(98)00127-0.On-chip generation and detection of electrochemiluminescence
Analytica Chimica Acta. 1998. DOI : 10.1016/S0003-2670(97)00689-2.Low-cost PDMS seal ring for single-side wet etching of MEMS structures
Sensors and Actuators A: Physical. 1998. DOI : 10.1016/S0924-4247(98)00132-0.Advanced deep reactive ion etching: a versatile tool for micromechanical systems
Journal of Micromechanics and Microengineering. 1998. DOI : 10.1088/0960-1317/8/4/003.Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
Sensors and Actuators A: Physical. 1998. DOI : 10.1016/S0924-4247(98)00110-1.Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy
Sensors and Actuators A: Physical. 1998. DOI : 10.1016/S0924-4247(98)80051-4.Holographic refractive index detector for application in microchip-based separation systems
The Analyst. 1998. DOI : 10.1039/a801478g.Patterned thick photoresist layers for protection of protruding structures during wet and dry etching processes
Journal of Micromechanics and Microengineering. 1998. DOI : 10.1088/0960-1317/8/2/007.Universal coulometric nanotitrators with potentiometric detection
Analytica Chimica Acta. 1998. DOI : 10.1016/S0003-2670(98)00034-8.Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components
MICROSYSTEM TECHNOLOGIES. 1998. DOI : 10.1007/s005420050119.Gel integrated microelectrode arrays for direct voltammetric measurements of heavy metals in natural waters and other complex media
Analytical Chemistry. 1998. DOI : 10.1021/ac971194c.1997
Self-Sharpening Tip Integrated on Micro Cantilevers with Self-Exciting Piezoelectric Sensor for Parallel Atomic Force Microscopy
Applied Physics Letters. 1997. DOI : 10.1063/1.118817.Performance of amperometric sensors based on multiple microelectrode arrays
Sensors and Actuators B: Chemical. 1997. DOI : 10.1016/S0925-4005(97)00159-7.Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids
Journal of Microelectromechanical Systems. 1997. DOI : 10.1109/84.650131.Potentiometric response behavior of parallel arrays of cation- and anion-selective membrane electrodes as reference devices
Electroanalysis. 1997. DOI : 10.1002/elan.1140091207.A New Fabrication Method for Borosilicate Glass Capillary Tubes with Lateral Inlets and Outlets
Sensors and Actuators A: Physical. 1997. DOI : 10.1016/S0924-4247(97)01360-5.Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFM
Sensors and Actuators A: Physical. 1997. DOI : 10.1016/S0924-4247(96)01440-9.Atomic Force Microscopy Using Cantilevers with Integrated Tips and Piezoelectric Layers for Actuation and Detection
Journal of Micromechanics and Microengineering. 1997. DOI : 10.1088/0960-1317/7/3/036.Principal Research Activities at SAMLAB, Switzerland
Bulletin Micromachine Center. 1997.Use of Photopolymerizable Membranes Based on Polyacrylamide Hydrogels for Enzymatic Microsensor Construction
Analytica Chimica Acta. 1997. DOI : 10.1016/S0003-2670(97)00332-2.Microelectrode arrays for electrophysiological monitoring of hippocampal organotypic slice cultures
IEEE Transactions on Biomedical Engineering. 1997. DOI : 10.1109/10.641344.Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applications
Journal of Microelectromechanical Systems. 1997. DOI : 10.1109/84.623118.A 1.5-V Supplied, CMOS ASIC for the Actuation of an Electrostatic Micromotor
IEEE/ASME Transactions on Mechatronics. 1997. DOI : 10.1109/3516.622967.Reliability Considerations for Electrostatic Polysilcion Actuators Using as an Example the Remo-Component
Sensors and Actuators A: Physical. 1997. DOI : 10.1016/S0924-4247(97)80304-4.1996
Ion-Selective Electrodes and Biosensors
Polymeric Materials Encyclopedia. 1996.Electrochemical Deposition of Enzymes on Microelectrodes
Biocybernetics and Biomedical Engineering. 1996.Micromachined Enzymatic Reactors
MST News. 1996.Megahertz Opto-Mechanical Modulator
Sensors and Actuators A: Physical. 1996. DOI : 10.1016/0924-4247(96)80124-5.Electrochemical Characterization of Thin-Film Carbon Interdigitated Electrode Arrays
Analytica Chimica Acta. 1996. DOI : 10.1016/0003-2670(96)00068-2.Extremely Stable Nafion Based Carbon Monoxide Sensor
Sensors and Actuators B: Chemical. 1996. DOI : 10.1016/S0925-4005(97)80040-8.Piezoelectric cantilever beams actuated by PZT sol-gel thin film
Sensors and Actuators A: Physical. 1996. DOI : 10.1016/S0924-4247(95)01196-X.Fabrication of an Integrated Silicon-Based Lens for Low-Energy Miniaturized Electron Columns
Japanese Journal of Applied Physics. 1996. DOI : 10.1143/JJAP.35.6641.Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors
Journal of Vacuum Science & Technology B. 1996. DOI : 10.1116/1.589171.Interdigitated Microelectrode Arrays Based on Sputtered Carbon Thin-Films
Sensors and Actuators B: Chemical. 1996. DOI : 10.1016/S0925-4005(97)80063-9.Glucose and Urea Measurement using micromachined open tubular heterogeneous enzyme reactors
DECHEMA Monographs. 1996.1995
Glucose Sensor Based on an Amperometric Microelectrode with a Photopolymerizable Enzyme Membrane
Sensors and Actuators B: Chemical. 1995. DOI : 10.1016/0925-4005(94)01631-Q.Integrated Array Sensor for Dectecting Organic Solvents
Sensors and Actuators B: Chemical. 1995. DOI : 10.1016/0925-4005(94)01573-Z.Micro-Adaptation of Chemical Sensor Materials
Sensors and Actuators A: Physical. 1995. DOI : 10.1016/0924-4247(95)01075-0.Numerical simulations of planar electrostatic wobble motors
Sensors and Actuators A: Physical. 1995. DOI : 10.1016/0924-4247(94)00978-Q.Electrochemical Techniques for the Modification of Microelectrodes
Biosensors and Bioelectronics. 1995. DOI : 10.1016/0956-5663(95)96794-Y.Hybrid ultrasonic elastic force motors micromachined in silicon
Integrated Ferroelectrics. 1995. DOI : 10.1080/10584589508012297.PZT films for micro-pumps
Integrated Ferroelectrics. 1995. DOI : 10.1080/10584589508012296.Integrated Circuit Compatible Electrostatic Polysilicon Microrelays
Journal of Micromechanics and Microengineering. 1995. DOI : 10.1088/0960-1317/5/2/026.Glucose-Sensitive ENFET using Potassium Ferricyanide as an Oxidizing Substrate: the Effect of an Additional Lysozyme Membrane
Sensors and Actuators B: Chemical. 1995. DOI : 10.1016/0925-4005(95)85025-2.A System to Measure 3-Directional Relative Displacements for a Biomedical Application
Microsystem Technologies. 1995. DOI : 10.1007/BF01624469.AFM imaging with an xy-micropositioner with integrated tip
Sensors and Actuators A: Physical. 1995. DOI : 10.1016/0924-4247(94)00962-H.1994
Electrodeposited Electrostatic Rigid-Rotor Wobble Motors on Silicon
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(94)00706-3.Silicon-Based Chemical Sensors and Chemical Analysis Systems
Sensors and Materials. 1994.Recent Developments in Integrated Chemical Analyzing Systems
Chemical Sensor Technology. 1994.Werkzeuge der Siliziumtechnologie
TR - Technische Rundschau. 1994.Piezoelectric Position Sensor for Ultrasonic EFM motors
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(94)80071-5.Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(93)00699-5.Glucose-Sensitive Enzyme Field Effect Transistor Using Potassium Ferricyanide as an Oxidizing Substrate
Analytical Chemistry. 1994. DOI : 10.1021/ac00074a005.Micromachined analyzers on a silicon chip
Clinical Chemistry. 1994. DOI : 10.1093/clinchem/40.9.1805.Line-Addressable Torsional Micromirrors for Light Modulator Arrays
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(94)80131-2.Three-Dimensional Micro-Flow Manifolds for Miniaturized Chemical Analysis Systems
Journal of Micromechanics and Microengineering. 1994. DOI : 10.1088/0960-1317/4/4/009.Universal Approach for the Fabrication of Ca2+-, K+- and NO3- sensitive Membrane ISFETs
Sensors and Actuators B: Chemical. 1994. DOI : 10.1016/0925-4005(94)87084-5.Array of Individually Addressable Microelectrodes
Sensors and Actuators B: Chemical. 1994. DOI : 10.1016/0925-4005(93)01126-O.Development of a Miniature Bioreactor for Continuous Culture in a Space Laboratory
Journal of Biotechnology. 1994. DOI : 10.1016/0168-1656(94)90144-9.Integrated Shielding lines on Multilayer Polysilicon Resonators
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(93)00710-L.Integrated flow-regulated silicon micropump
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(93)00703-7.Organic Membranes for Miniaturized Electrochemical Sensors : Fabrication of a Combined pO2, pCO2 and pH Sensor
Journal of Electroanalytical Chemistry. 1994. DOI : 10.1016/0022-0728(94)87070-5.Glucose Measurement Using a Micromachined Open Tubular Heterogeneous Enzyme Reactor (MOTHER)
Microsystem Technologies. 1994. DOI : 10.1007/BF01367760.Microlever with combined integrated sensor/actuator functions for scanning force microscopy
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(93)00701-5.A novel approach to ion separations in solution : synchronized cyclic capillary electrophoresis (SCCE)
Sensors and Actuators B: Chemical. 1994. DOI : 10.1016/0925-4005(93)01200-N.1993
Electrodeposition of glucose oxidase for the fabrication of miniature sensors
Sensors and Actuators B: Chemical. 1993. DOI : 10.1016/0925-4005(93)85323-3.Lifespan of Subcutaneous Glucose Sensors and their Performances During Dynamic Glycaemia Changes in Rats
Journal of Biomedical Engineering. 1993. DOI : 10.1016/0141-5425(93)90058-7.On-Wafer Fabricated Free-Chlorine Sensor with ppb Detection Limit for Drinking-Water Monitoring
Sensors and Actuators B: Chemical. 1993. DOI : 10.1016/0925-4005(93)85410-C.Spatially Controlled Membrane Depositions for Silicon-Based Sensors
CHIMIA. 1993. DOI : 10.2533/chimia.1993.241.Miniature Electrochemical Glucose Biosensors
Analytica Chimica Acta. 1993. DOI : 10.1016/0003-2670(93)85003-3.Microsystems for Flow Injection Analysis
Analytical Methods and Instrumentation. 1993.Microfabricated tools for nanoscience
Journal of Micromechanics and Microengineering. 1993. DOI : 10.1088/0960-1317/3/4/001.Sensor Based on the Hot-Wire Principle
Sensors and Actuators A: Physical. 1993. DOI : 10.1016/0924-4247(93)80117-Y.Comb Actuators for XY-Microstages
Sensors and Actuators A: Physical. 1993. DOI : 10.1016/0924-4247(93)80185-J.Integrated Blood-Gas Sensor for pO2, pCO2 and pH
Sensors and Actuators B: Chemical. 1993. DOI : 10.1016/0925-4005(93)85396-R.Modular Setup for a Miniaturized Chemical Analysis System
Sensors and Actuators B: Chemical. 1993. DOI : 10.1016/0925-4005(93)85053-D.Synchronized Cyclic Capillary Electrophoresis - A Novel Approach to Ion Separations in Solution
Journal of High Resolution Chromatography. 1993. DOI : 10.1002/jhrc.1240161005.A Modular Miniaturized Chemical Analysis System
Sensors and Actuators B: Chemical. 1993. DOI : 10.1016/0925-4005(93)85394-P.Micro Liquid Handling Using a Flow-Regulated Silicon Micropump
Journal of Micromechanics and Microengineering. 1993. DOI : 10.1088/0960-1317/3/4/011.Microsystems Research and Development at IMT Neuchatel - Introduction
Journal of Micromachine Society. 1993.1992
A Silicon Flow Cell for Optical Detection in Miniaturized Total Chemical Analysis Systems
Sensors and Actuators B: Chemical. 1992. DOI : 10.1016/0925-4005(92)80032-S.Micromachined silicon cantilevers and tips for bidirectional force microscopy
Ultramicroscopy. 1992. DOI : 10.1016/0304-3991(92)90469-Z.A Study of a High-Pressure Micropump for Integrated Chemical Analysing Systems
Sensors and Actuators A: Physical. 1992. DOI : 10.1016/0924-4247(92)80008-Q.Miniaturized Chemical Analysis Systems
Dechema-Monographien Band. 1992.Polymeric Membranes for Silicon Based (Bio)Sensors
Journal of Biomaterials Applications. 1992. DOI : 10.1177/088532829200700103.Damping of Piezoresistive Silicon Accelerometers
Sensors and Actuators A: Physical. 1992. DOI : 10.1016/0924-4247(92)80015-U.Biaxial Scanning Mirror Activated by Bimorph Structures for Medical Applications
Sensors and Actuators A: Physical. 1992. DOI : 10.1016/0924-4247(92)80076-F.Silicon-Based Chlorine Sensor with On-Wafer Deposited Chemically Anchored Diffusion Membrane
Analytica Chimica Acta. 1992. DOI : 10.1016/0003-2670(92)85135-S.Micromachined atomic force microprobe with integrated capacitive read-out
Journal of Micromechanics and Microengineering. 1992. DOI : 10.1088/0960-1317/2/3/026.Silicon cantilevers and tips for scanning force microscopy
Sensors and Actuators A: Physical. 1992. DOI : 10.1016/0924-4247(92)85002-J.Micromechanical Comb Actuators with Low Driving Voltage
Journal of Micromechanics and Microengineering. 1992. DOI : 10.1088/0960-1317/2/4/006.Electrocatalytic Oxidation of Methanol on Platinum Microparticles in Polypyrrole
Journal of Applied Electrochemistry. 1992. DOI : 10.1007/BF01024140.A Microfabricated Glucose Sensor : Fabrication, Characterization, In Vitro and In Vivo Performances and Related Problems
Advances in Biosensors. 1992.Surface Micromachining
Journal of Micromechanics and Microengineering. 1992. DOI : 10.1088/0960-1317/2/3/003.A Silicon Integrated Miniature Chemical Analysis System
Sensors and Actuators B: Chemical. 1992. DOI : 10.1016/0925-4005(92)80030-2.1991
Capacitive Polysilicon Resonator with MOS Detection Circuit
Sensors and Actuators A: Physical. 1991. DOI : 10.1016/0924-4247(91)87056-9.Mechanical Sensors in Medicine
RBM-Revue européenne de technologie biomédicale. 1991.A Flow Injection Analysis System with Glass-Bonded ISFETs for the Simultaneous Detection of Calcium and Potassium Ions and pH
Sensors and Actuators B: Chemical. 1991. DOI : 10.1016/0925-4005(91)80116-2.Silicon Pressure Sensor Based on a Resonating Element
Sensors and Actuators A: Physical. 1991. DOI : 10.1016/0924-4247(91)87076-F.Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy
Microelectronic Engineering. 1991. DOI : 10.1016/0167-9317(91)90252-9.In-Vivo Behaviour of Hypodermically Implanted Microfabricated Glucose Sensors
Biosensors and Bioelectronics. 1991. DOI : 10.1016/0956-5663(91)85005-H.Zeta Potential Measurements of Ta2O5 and SiO2 Thin Films
Journal of Colloid and Interface Science. 1991. DOI : 10.1016/0021-9797(91)90130-Z.Realization of Different Polysilicon Resonators with Integrated Excitation and Detection Elements
Microelectronic Engineering. 1991. DOI : 10.1016/0167-9317(91)90253-A.Characterization and Modelling of Silicon Piezoresistive Accelerometers Fabricated by a Bipolar-Compatible Process
Sensors and Actuators A: Physical. 1991. DOI : 10.1016/0924-4247(91)87058-B.ASEP : a CAD Program for Silicon Anisotropic Etching
Sensors and Actuators A: Physical. 1991. DOI : 10.1016/0924-4247(91)80009-E.Microstructured ISFETs
Chemical Sensor Technology. 1991.Design of an Integrated Electrostatic Stepper Motor with Axial Field
Sensors and Actuators A: Physical. 1991. DOI : 10.1016/0924-4247(91)87057-A.1990
Applications of Micromachined Sensors Integrated Micro-Motion Systems : Micromachining
Control and Applications. 1990.Very High Q-Factor Resonators in Monocrystalline Silicon
Sensors and Actuators A: Physical. 1990. DOI : 10.1016/0924-4247(90)85064-B.Multi-ion Sensing System Based on Glass-encapsulated pH-ISFETs and a Pseudo-REFET
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80237-T.Distribution of Vt of Dual FETs in View of their Application to Differential Measurements with ISFET-MAOSFET Pairs
Sensors and Materials. 1990.Hysteresis in Al2O3 Gate ISFETs
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80018-U.Use of pH-ISFET Sensors during Extracorporal Circulation
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80254-W.Microfabricated Sensors for Medical Applications
Biomedizinische Technik. 1990.Réalisation d'un micro-calorimètre intégré dans le silicium
KOND. 1990.Microstructured Solid-State Ion-Sensitive Membranes by Thermal Oxidation of Ta
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80227-Q.Investigations on Free-Standing Polysilicon Beams in View of their Application as Transducers
Sensors and Actuators A: Physical. 1990. DOI : 10.1016/0924-4247(90)87088-Z.Prototype Structure for Systematic Investigations of Thin-Film Gas Sensors
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80195-6.A Micro-Volume Open Liquid-Junction Reference Electrode for pH-ISFETs
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80243-S.1989
A Combined pH-Pressure Catheter for Gastro-Enterological Applications
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)80043-5.Carbondioxide Gas Sensing Electrode Based on a pH-ISFET with Back-Side Contacts
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)80091-5.Planar Amperometric Enzyme-Based Glucose Microelectrode
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)87015-5.Fabrication and Characterization of a Planar Electrochemical Cell and its Application as a Glucose Sensor
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)87025-8.Resonant Silicon Structures
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)80074-5.A Planar Glucose Enzyme Electrode
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)80042-3.In-Vivo Response of Microfabricated Glucose Sensors to Glycemia Changes in Normal Rats
Biomedica Biochimica Acta. 1989.Study of Electrochemical Etch-Stop for High-Precision Thickness Control of Silicon Membranes
IEEE Transactions on Electron Devices. 1989. DOI : 10.1109/16.22472.1988
Solvent Polymeric Membranes Combined with Chemical Solid-State Sensors
Analyst. 1988. DOI : 10.1039/an9881301029.A Planar Glucose Enzyme Electrode
Technical Digest of Eurosensors. 1988.Design, Fabrication and Characterization of pH-Sensitive ISFETs
Analusis. 1988.The Temperature Dependence of the Surface Potential of the Al2O3Electrolyte Interface
Journal of Colloid and Interface Science. 1988. DOI : 10.1016/0021-9797(88)90369-4.A pH-ISFET and an Integrated pH-Pressure Sensor with Back-Side Contacts
Sensors and Actuators. 1988. DOI : 10.1016/0250-6874(88)80063-5.Mikromechanik
Zeitschrift Hard and Soft. 1988.1987
The Potential Dependence of Silicon Anisotropic Etching in KOH at 60ÝC
Electroanalytical Chemistry. 1987. DOI : 10.1016/0022-0728(87)85168-9.1986
Siliziumsensoren
Sonderpublikation der VDI-Zeitschrift. 1986.1984
Comment le silicium «voit» son environnement
Annales de l'Université de Neuchâtel. 1984.In-Vivo Experiments with a pH-ISFET Electrode
Medical & Biological Engineering & Computing. 1984. DOI : 10.1007/BF02443738.1983
Micro-capteurs basés sur le silicium et éléments électroniques sensibles aux espèces chimiques
Bulletin ASE/UCS. 1983. DOI : 10.5169/seals-904792.The Influence of Counter-Ion Adsorption on the yo/pH Characteristics of Insulator Surfaces
Surface Science. 1983. DOI : 10.1016/0039-6028(83)90237-6.1981
The History of Chemically Sensitive Semiconductor Devices
Sensors and Actuators. 1981. DOI : 10.1016/0250-6874(81)80003-0.The Solid / Liquid Interface
Sensors and Actuators. 1981. DOI : 10.1016/0250-6874(81)80008-X.1980
The Influence of the pH on the Electrolyte-SiO2-Si System Studied by Ion-sensitive Fet Measurements and Quasistatic C-V Measurements
Thin Solid Films. 1980. DOI : 10.1016/0040-6090(80)90167-4.1978
Influence of Positive Ions on the Current-Voltage Characteristics of MOS Structures
Journal of Applied Physics. 1978. DOI : 10.1063/1.325170.1977
An Investigation of the Hydration Properties of Chemically Vapour-deposited Silicon Dioxide Films by Means of Ellipsometry
Thin Solid Films. 1977. DOI : 10.1016/0040-6090(77)90036-0.Teaching & PhD
Past EPFL PhD Students
Grégoire Genolet, Jérôme Courbat, Nicolas Golay, Olivier Frey, Dara Zaman Bayat, Don Isarakorn, Luc Gervais, Michael David Canonica, Fabio Jutzi, Luca Ribetto, David de Koninck, Jonathan Masson, Philip Wägli, Blaise Guélat, Sara Talaei, Rahel Strässle, Rokhaya Gueye, Frédéric Loizeau, Francisco Molina Lopez, Pattanaphong Janphuang, Yexian Wu, Andres Felipe Vasquez Quintero