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Professeur assistant tenure-track |
STI
IMT
LMTS
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Professeur assistant tenure-track |
STI
STI-SMT
SMT-ENS
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Membre de la CCE |
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Conférence du corps enseignant
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Herbert Shea
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Laboratoire des microsystèmes pour les technologies spatiales
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MISSION
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The lab's mission is to develop reliable MEMS for use in Spacecraft, as well as innovative polymer MEMS micro-actuators. More info on the Microsystems for Space Technologies Lab at: http://lmts.epfl.ch
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Formation
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PhD, Physics, Harvard University, 1997
MA, Physics, Harvard University, 1993
BSc, Physics, McGill University, 1991
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Parcours professionnel
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Postdoctoral Fellow, IBM TJ Watson Research Center,
Yorktown Heights, NY, USA, 1997-1999
Member of Technical Staff, Bell Labs, Lucent Technologies, 1999-2001
Technical Manager, MEMS Reliability Group, Bell Labs, Lucent Technologies, 2001-2004
Assistant Professor, Tenure Track, LMTS, EPFL, 2004 - present
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Recent Invited talks
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• SPIE Photonics West 2009, “MEMS for pico-satellites”, January 2009, San Jose, USA
• International Conference in MEMS 2009 (ICMEMS 09), “Micromachined Dielectric Elastomer Actuators with Ion Implanted Electrodes”, January 2009, Chennai, India
• Micro 08 “Microsystèmes en orbite”, September 2008, Neuchatel, Switzerland
• IWPSD 2007, “Micromachined electric propulsion using ionic liquids as fuel”, 14th International Workshop on the Physics of Semiconductor Devices, Mumbai, India, December 2007.
• Short course given at Caneus 2006, “ MEMS and Nano Technologies for Space” by N. de Rooij, H. Shea and D. Briand, August 2006, Toulouse, France
• SPIE Photonics West 2006, “Reliability of MEMS for space applications”, January 25, 2006, San Jose, CA, USA
• 3rd World Congress on Biomimetics, Artificial Muscles & Nano-Bio, Keynote Speaker: “Microactuators based on Ion-Implanted Electroactive Polymer Membranes”, May 2006, Lausanne, Switzerland
• OMEMS 2004, “Design for Reliability of Drift-Free MEMS Micromirrors”, August 25, 2004, Takamatsu, Japan
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MAIN PUBLICATIONS
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S. Rosset, M. Niklaus, P. Dubois, and H. Shea.
Large-Stroke Dielectric Elastomer Actuators With Ion-
Implanted Electrodes.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,
18(6):1300-1308, 2009.
[ Details |
Full Text |
Link ]
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H. Shea.
Radiation sensitivity of microelectromechanical system devices.
Journal of Micro/Nanolithography, MEMS, and MOEMS,
8(3):031303, 2009.
[ Details |
Full Text |
Link ]
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R. Krpoun, K. Smith, J. Stark, and H. Shea.
Tailoring the hydraulic impedance of out-of-plane micromachined
electrospray sources with integrated electrodes.
Applied Physics Letters, 94:163502, 2009.
[ Details |
Full Text |
Link ]
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R. Krpoun and H. Shea.
Integrated out-of-plane nanoelectrospray thruster arrays for
spacecraft propulsion.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING,
19:045019-045029, 2009.
[ Details |
Full Text |
Link ]
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S. Rosset, M. Niklaus, P. Dubois, and H. Shea.
Metal Ion Implantation for the Fabrication of Stretchable
Electrodes on Elastomers.
Advanced Functional Materials, 19:470 - 478, 2009.
[ Details |
Full Text |
Link ]
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P. Carazzetti, P. Renaud, and H. Shea.
Micromachined chip-scale plasma light source.
Sensors and Actuators A, 154:275-280, 2009.
[ Details |
Full Text |
Link ]
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M. Niklaus, S. Rosset, M. Dadras, P. Dubois, and S. Herbert.
Microstructure of 5 keV gold-implanted polydimethylsiloxane.
Scripta Materialia, 59:893-896, 2008.
[ Details |
Full Text |
Link ]
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P. Dubois, S. Rosset, M. Niklaus, M. Dadras, and H. Shea.
Voltage control of the resonance frequency of dielectric
electroactive polymer (DEAP) membranes.
Journal of Microelectromechanical Systems, 17:1072 - 1081,
2008.
[ Details |
Full Text |
Link ]
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S. Rosset, M. Niklaus, P. Dubois, and H. R. Shea.
Mechanical characterization of a dielectric elastomer microactuator
with ion-implanted electrodes.
Sensors and Actuators A: Physical, 144(1):185-193, 2008.
[ Details |
Full Text |
Link ]
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P. Dubois, S. Rosset, S. Koster, J. Stauffer, S. Mikhaïlov, M. Dadras, N.-F.
de Rooij, and H. Shea.
Microactuators based on ion implanted dielectric electroactive
polymer (EAP) membranes.
Sensors and Actuators A: Physical, 130-131:147-154,
2006.
[ Details |
Full Text |
Link ]
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H. Shea, A. Gasparyan, H. Chan, S. Arney, R. Frahm, D. López, S. Jin, and
R. McConnell.
Effects of electrical leakage currents on MEMS reliability and
performance.
IEEE TRANSACTIONS ON DEVICE AND MATERIALS
RELIABILITY, 4(2):198-206, 2004.
[ Details |
Link ]
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H. Shea, R. Martel, and P. Avouris.
Electrical transport in rings of single-wall nanotubes: one-
dimensional localization.
PHYSICAL REVIEW LETTERS, 84(19):4441-4444, 2000.
[ Details |
Link ]
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R. Martel, H. Shea, and P. Avouris.
Rings of single-walled carbon nanotubes.
NATURE, 398:299, 1999.
[ Details |
Link ]
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H. Shea, R. Martel, T. Hertel, T. Schmidt, and P. Avouris.
Manipulation of carbon nanotubes and properties of nanotube
fied-effect transistors and rings.
Microelectronic Engineering 1999, 46:101-104, 1999.
[ Details |
Link ]
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R. Martel, T. Schmidt, H. Shea, T. Hertel, and P. Avouris.
Single- and multi-wall carbon nanotube field-effect transistors.
APPLIED PHYSICS LETTERS, 73(17):2447-2449, 1998.
[ Details |
Link ]
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Conference papers, Thesis, Patents
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Link to all my lab's journal and conference papers, thesis and patents
Herb Shea's citation index (via ResearchID)
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Links from EPFL-LMTS Lab webpage
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People
Research Activities
Funding Sources
Publications
Teaching
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