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Professeur assistant tenure-track
STI
IMT
LMTS

Professeur assistant tenure-track
STI
STI-SMT
SMT-ENS
Membre de la CCE
Conférence du corps enseignant
Herbert Shea
Laboratoire des microsystèmes pour les technologies spatiales
Assistant Professor, Tenure Track
site web: http://lmts.epfl.ch

bureau(x): BM3110 JD14.N.05
tél: [+41 21 69] 36663,0327205584
MISSION
The lab's mission is to develop reliable MEMS for use in Spacecraft, as well as innovative polymer MEMS micro-actuators. More info on the Microsystems for Space Technologies lab at: http://lmts.epfl.ch
Formation
PhD, Physics, Harvard University, 1997
MA, Physics, Harvard University, 1993
BSc, Physics, McGill University, 1991
Parcours professionnel
Postdoctoral Fellow, IBM TJ Watson Research Center, Yorktown Heights, NY, USA, 1997-1999
Member of Technical Staff, Bell Labs, Lucent Technologies, 1999-2001
Technical Manager, MEMS Reliability Group, Bell Labs, Lucent Technologies, 2001-2004
Assistant Professor, Tenure Track, LMTS, EPFL, 2004 - present
Recent Invited talks
• SPIE Photonics West 2009, “MEMS for pico-satellites”, January 2009, San Jose, USA
• International Conference in MEMS 2009 (ICMEMS 09), “Micromachined Dielectric Elastomer Actuators with Ion Implanted Electrodes”, January 2009, Chennai, India
• Micro 08 “Microsystèmes en orbite”, September 2008, Neuchatel, Switzerland
• IWPSD 2007, “Micromachined electric propulsion using ionic liquids as fuel”, 14th International Workshop on the Physics of Semiconductor Devices, Mumbai, India, December 2007.
• Short course given at Caneus 2006, “ MEMS and Nano Technologies for Space” by N. de Rooij, H. Shea and D. Briand, August 2006, Toulouse, France
• SPIE Photonics West 2006, “Reliability of MEMS for space applications”, January 25, 2006, San Jose, CA, USA
• 3rd World Congress on Biomimetics, Artificial Muscles & Nano-Bio, Keynote Speaker: “Microactuators based on Ion-Implanted Electroactive Polymer Membranes”, May 2006, Lausanne, Switzerland
• OMEMS 2004, “Design for Reliability of Drift-Free MEMS Micromirrors”, August 25, 2004, Takamatsu, Japan

MAIN PUBLICATIONS
J. Choi, S. Rosset, M. Niklaus, J. Adleman, H. Shea, and D. Psaltis. 3-dimensional electrode patterning within a microfluidic channel using metal ion implantation. Lab on a Chip, 2010.
[ Details | Link ]
A. Cimatti, M. Robberto, . a. et al., H. Shea, and . a. et al. SPACE: the spectroscopic all-sky cosmic explorer. Experimental Astronomy, 23:39-66, 2009.
[ Details | Full Text | Link ]
S. Rosset, M. Niklaus, P. Dubois, and H. Shea. Large-Stroke Dielectric Elastomer Actuators With Ion- Implanted Electrodes. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 18(6):1300-1308, 2009.
[ Details | Full Text | Link ]
P. Carazzetti and H. Shea. Electrical breakdown at low pressure for planar microelectromechanical systems with 10- to 500-micron gaps. Journal of Micro/Nanolithography, MEMS, and MOEMS,, 8(3):031305, 2009.
[ Details | Full Text | Link ]
H. Shea. Radiation sensitivity of microelectromechanical system devices. Journal of Micro/Nanolithography, MEMS, and MOEMS, 8(3):031303, 2009.
[ Details | Full Text | Link ]
R. Krpoun, K. Smith, J. Stark, and H. Shea. Tailoring the hydraulic impedance of out-of-plane micromachined electrospray sources with integrated electrodes. Applied Physics Letters, 94:163502, 2009.
[ Details | Full Text | Link ]
R. Krpoun and H. Shea. Integrated out-of-plane nanoelectrospray thruster arrays for spacecraft propulsion. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 19:045019-045029, 2009.
[ Details | Full Text | Link ]
P. Dubois, C. Botteron, V. Mitev, C. Menon, P.-A. Farine, P. Dainesi, A. Ionescu, and H. Shea. Ad-Hoc Wireless Sensor Networks For Exploration Of Solar-System Bodies. Acta Astronautica, pages 470 - 478, 2009.
[ Details | Full Text | Link ]
S. Rosset, M. Niklaus, P. Dubois, and H. Shea. Metal Ion Implantation for the Fabrication of Stretchable Electrodes on Elastomers. Advanced Functional Materials, 19:470 - 478, 2009.
[ Details | Full Text | Link ]
P. Carazzetti, P. Renaud, and H. Shea. Micromachined chip-scale plasma light source. Sensors and Actuators A, 154:275-280, 2009.
[ Details | Full Text | Link ]
P. Dubois, S. Rosset, M. Niklaus, M. Dadras, and H. Shea. Metal Ion Implanted Compliant Electrodes in Dielectric Electroactive Polymer (EAP) Membranes. Advances in Science and Technology, 61:18-25, 2008. special issue, CIMTEC 2008 conference.
[ Details | Full Text | Link ]
R. Krpoun and H. R. Shea. A method to determine the onset voltage of single and arrays of electrospray emitters. J. Appl. Phys., 104(6):064511, 2008.
[ Details | Full Text | Link ]
M. Niklaus, S. Rosset, M. Dadras, P. Dubois, and S. Herbert. Microstructure of 5 keV gold-implanted polydimethylsiloxane. Scripta Materialia, 59:893-896, 2008.
[ Details | Full Text | Link ]
M. Bodendorfer, K. Altwegg, P. Wurz, and H. Shea. Identification of the ECR zone in the SWISSCASE ECR ion source. Nuclear Instruments and Methods in Physics Research B, 266:4788-4793, 2008.
[ Details | Full Text | Link ]
P. Dubois, S. Rosset, M. Niklaus, M. Dadras, and H. Shea. Voltage control of the resonance frequency of dielectric electroactive polymer (DEAP) membranes. Journal of Microelectromechanical Systems, 17:1072 - 1081, 2008.
[ Details | Full Text | Link ]
S. Rosset, M. Niklaus, P. Dubois, and H. R. Shea. Mechanical characterization of a dielectric elastomer microactuator with ion-implanted electrodes. Sensors and Actuators A: Physical, 144(1):185-193, 2008.
[ Details | Full Text | Link ]
M. Bodendorfer, K. Altwegg, H. Shea, and P. Wurz. Field structure and electron life times in the MEFISTO electron cyclotron resonance ion source. Nuclear Instruments and Methods in Physics Research B, 266:820-828, 2008.
[ Details | Full Text | Link ]
P. Dubois, S. Rosset, S. Koster, J. Stauffer, S. Mikhaïlov, M. Dadras, N.-F. de Rooij, and H. Shea. Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes. Sensors and Actuators A: Physical, 130-131:147-154, 2006.
[ Details | Full Text | Link ]
H. Shea, A. Gasparyan, H. Chan, S. Arney, R. Frahm, D. López, S. Jin, and R. McConnell. Effects of electrical leakage currents on MEMS reliability and performance. IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 4(2):198-206, 2004.
[ Details | Link ]
V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop. Beam-steering micromirrors for large optical cross-connects. JOURNAL OF LIGHTWAVE TECHNOLOGY, 21(3):634-642, 2003.
[ Details | Link ]
J. Kim, C. Nuzman, B. Kumar, D. Lieuwen, J. Kraus, A. Weiss, C. Lichtenwalner, A. Papazian, R. Frahm, N. Basavanhally, D. Ramsey, V. Aksyuk, F. Pardo, M. Simon, V. Lifton, H. Chan, M. Haueis, A. Gasparyan, H. Shea, S. Arney, C. Bolle, P. Kolodner, R. Ryf, D. Neilson, and J. Gates. 1100 x 1100 Port mems-based optical crossconnect with 4-db maximum loss. IEEE PHOTONICS TECHNOLOGY LETTERS, 15(11):1537-1539, 2003.
[ Details | Link ]
V. Aksyuk, S. Arney, N. Basavanhally, D. Bishop, C. Bolle, C. Chang, R. Frahm, A. Gasparyan, J. Gates, R. George, C. Giles, J. Kim, P. Kolodner, T. Lee, D. Neilson, C. Nijander, C. Nuzman, M. Paczkowski, A. Papazian, F. Pardo, D. Ramsey, R. Ryf, R. Scotti, H. Shea, and M. Simon. 238 x 238 Micromechanical optical cross connect. IEEE PHOTONICS TECHNOLOGY LETTERS, 15(4):587-589, 2003.
[ Details | Link ]
H. Shea, R. Martel, and P. Avouris. Electrical transport in rings of single-wall nanotubes: one- dimensional localization. PHYSICAL REVIEW LETTERS, 84(19):4441-4444, 2000.
[ Details | Link ]
R. Martel, H. Shea, and P. Avouris. Rings of single-walled carbon nanotubes. NATURE, 398:299, 1999.
[ Details ]
P. Avouris, T. Hertel, R. Martel, T. Schmidt, H. Shea, and R. Walkup. Carbon nanotubes: nanomechanics, manipulation, and electronic devices. APPLIED SURFACE SCIENCE, 141:201-209, 1999.
[ Details | Link ]
P. Avouris, T. Hertel, R. Martel, T. Schmidt, H. Shea, and R. Walkup. CARBON NANOTUBES: NANOMECHANICS, MANIPULATION, AND ELECTRONIC DEVICES. APPLIED SURFACE SCIENCE, 141:201-209, 1999.
[ Details ]
H. Shea, R. Martel, T. Hertel, T. Schmidt, and P. Avouris. Manipulation of carbon nanotubes and properties of nanotube fied-effect transistors and rings. Microelectronic Engineering 1999, 46:101-104, 1999.
[ Details | Link ]
R. Martel, T. Schmidt, H. Shea, T. Hertel, and P. Avouris. Single- and multi-wall carbon nanotube field-effect transistors. APPLIED PHYSICS LETTERS, 73(17):2447-2449, 1998.
[ Details | Link ]
R. Martel, T. Schmidt, H. Shea, T. Hertel, and P. Avouris. Single- and multi-wall carbon nanotube field-effect transistors. APPLIED PHYSICS LETTERS, 73(17):2447-2449, 1998.
[ Details | Link ]
H. Shea and M. Tinkham. Transition temperature of josephson junction arrays with long-range interaction. PHYSICAL REVIEW LETTERS, 79(12):2324-2327, 1997.
[ Details | Link ]
Conference papers, Thesis, Patents

Link to my lab's conference papers, thesis and patents
Herb Shea's citation index (via ResearchID)

Links from EPFL-LMTS Lab webpage
People
Research Activities
Funding Sources
Publications
Teaching
Enseignement
Microtechnique

Programmes doctoraux
Doctorants
Akbari Samin
Ghose Kaustav
Lalgudi Venkatraman Vinu
Niklaus Muhamed

A dirigé les thèses de:
Bodendorfer Michael Thesis details
Krpoun Renato Thesis details
Rosset Samuel Thesis details


©2004-2010 Herbert Shea - EPFL, 1015 Lausanne - mise à jour le : 2010-02-01 11:07:52
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